MEMS Light Deflector Structure for High-Frequency Large-Mirror Scanning

The patent applies local quality by creating thick portions at specific locations of the support and connecting portion. These localized thickened areas increase torsional stiffness where needed most (at the support root and connecting portion) without increasing the overall mirror size, thereby maintaining high resonance frequency while achieving large scanning area through the larger mirror surface.

The patent changes the structural parameters of the support and connecting portion by introducing thick portions with increased thickness. This parameter change increases the torsional stiffness (k) of the suspension system, which directly affects the resonance frequency (f = 1/(2π) * √(k/m)). By increasing k through the thick portions while maintaining the same mirror mass m, the resonance frequency increases, enabling faster scanning speeds while preserving drive sensitivity through the larger mirror area.

The patent applies segmentation by dividing the support structure into distinct regions: thin portions for most of the support length (reducing weight and maintaining simplicity) and localized thick portions at critical locations (increasing torsional stiffness where needed). This segmented approach allows the structure to be simple and lightweight overall while having strategically reinforced areas that provide the necessary structural rigidity for high resonance frequency.