Light Mitigation Structure for MEMS Sensor Package Lid
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Solution Overview
Problem
Microelectromechanical system (MEMS) sensors, such as microphones, are susceptible to performance interference and degradation due to light energy exposure, which can generate electrical signals that interfere with signal processing and cause noise or component degradation.
Innovation Solution
A MEMS sensor package with a light mitigation structure on the lid, featuring a substrate with a through-hole and a movable MEMS component, where the lid includes a light mitigation structure above the MEMS diaphragm or component to absorb or redirect incoming light energy, preventing it from impacting the sensor's performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the access port is left exposed to receive signals, then signal reception is enabled, but light energy can enter and generate interfering electrical signals
Solution Approach 1:
A light mitigation structure is introduced as an intermediary element within the access port cavity. This structure positions itself between the light source and the MEMS sensor, absorbing or scattering incident light before it can reach the sensor and generate interfering electrical signals, while maintaining acoustic signal transmission capability
Solution Approach 2:
The light mitigation structure is strategically positioned only in the region where light interference occurs (above the MEMS sensor within the access port cavity), rather than blocking the entire access port. This localized approach selectively mitigates light interference while preserving acoustic signal reception pathways
2Object-affected harmful factors
If a light mitigation structure is added to block light, then light interference is reduced, but device complexity increases
Solution Approach 1:
The light mitigation structure is integrated with the existing lid component of the MEMS package. By merging the light mitigation function into the lid structure rather than adding a separate independent component, the overall device complexity is minimized while still achieving effective light interference reduction
Solution Approach 2:
The lid structure is designed to serve multiple functions: it provides mechanical protection for the MEMS sensor, defines the access port cavity, and incorporates the light mitigation structure to block light interference. This multi-functionality reduces the need for additional separate components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The light mitigation structure effectively reduces short-term and long-term interference from light energy, enhancing the accuracy and reliability of MEMS sensors by minimizing electrical noise and preventing component degradation.
Implementation Method 1
the lid includes a light mitigation structure located above the movable MEMS component
Data Source
AI summary
A MEMS sensor includes a through hole to allow communication with an external environment, such as to send or receive acoustic signals or to be exposed to the ambient environment. In addition to the information that is being measured, light energy may also enter the environment of the sensor via the through hole, causing short-term or long-term effects on measurements or system components. A light mitigating structure is formed on or attached to a lid of the MEMS die to absorb or selectively reflect the received light in a manner that limits effects on the measurements or interest and system components.