MEMS Sensor Light Mitigation Structure
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Solution Overview
Problem
MEMS sensors, such as microphones and pressure sensors, face performance interference and degradation due to light energy entering through access ports, which can generate electrical signals that obscure acoustic signals and cause long-term component damage.
Innovation Solution
A microelectromechanical system (MEMS) sensor package with a light mitigation structure on the lid, featuring a light-absorbing or reflective surface to absorb or redirect incoming light energy, preventing it from impacting the sensor's performance and components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the access port is left exposed to receive acoustic signals, then the sensor can capture acoustic information accurately, but light energy can enter and generate interfering electrical signals
Solution Approach 1:
A light mitigation structure is introduced as an intermediary element within the access port. This structure selectively blocks light energy while allowing acoustic waves to pass through to the MEMS sensor, thereby mediating between the need for acoustic signal reception and the need to prevent light interference.
Solution Approach 2:
The light mitigation structure is positioned specifically at the access port where light interference occurs, rather than blocking the entire sensor assembly. This localized approach maintains acoustic signal transmission while addressing the harmful light energy only where it enters the system.
2Object-affected harmful factors
If a light mitigation structure is added to block light energy, then light interference is reduced, but the device complexity increases
Solution Approach 1:
The light mitigation structure is integrated with the existing lid assembly of the MEMS sensor package. By merging the light-blocking function with the protective lid structure, the design avoids adding a completely separate component, thereby reducing the increase in device complexity.
Solution Approach 2:
The lid assembly is designed to serve multiple functions: protecting the MEMS sensor from environmental damage and blocking light energy through the integrated light mitigation structure. This multi-functionality reduces the need for additional dedicated components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The light mitigation structure effectively reduces short-term and long-term interference from light energy, enhancing the accuracy and durability of MEMS sensors by minimizing noise and component degradation.
Implementation Method 1
a light-absorbing or reflective surface to absorb or redirect incoming light energy
Implementation Method 2
a light-absorbing or reflective surface to absorb or redirect incoming light energy
Data Source
AI summary
A MEMS sensor includes a through hole to allow communication with an external environment, such as to send or receive acoustic signals or to be exposed to the ambient environment. In addition to the information that is being measured, light energy may also enter the environment of the sensor via the through hole, causing short-term or long-term effects on measurements or system components. A light mitigating structure is formed on or attached to a lid of the MEMS die to absorb or selectively reflect the received light in a manner that limits effects on the measurements or interest and system components.