MEMS Lissajous Scan Axis Synchronization for Fast Startup Lock

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Solution Overview

Problem

Lissajous scanning systems face delays in achieving synchronization between scanning axes, particularly during startup, due to the need to align microelectromechanical system (MEMS) mirrors with reference signals, which can be time-consuming and may result in phase errors, especially with narrow resonance curves.

Innovation Solution

A system comprising an oscillator structure, drivers for generating drive signals, a phase error detector, comparator circuit, reference signal generator, and synchronization controller to synchronize the oscillations of two scanning axes by monitoring angular trajectories and triggering reference signals when the phase difference is within a threshold, enabling faster Lissajous lock.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the MEMS mirror resonance curve is walked to the targeted working point and the axis is synchronized towards a reference frequency, then synchronization accuracy is improved, but the startup time increases significantly

Engineering Contradiction:
Improvesynchronization accuracyVSAvoidstartup time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent applies preliminary action by pre-calculating and storing optimal frequency points and synchronization parameters in lookup tables before operation. During startup, the system directly retrieves pre-computed synchronization data instead of performing time-consuming real-time frequency walking and phase alignment, thereby achieving fast startup without sacrificing synchronization accuracy.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent replaces the traditional mechanical frequency walking process with a computational approach using lookup tables and digital signal processing. Instead of physically tuning the MEMS mirror frequency through gradual adjustment, the system uses pre-stored frequency data and digital control algorithms to achieve synchronization, significantly reducing startup time while maintaining precision.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If large phase errors are compensated for during startup, then synchronization accuracy is improved, but the total startup time is violated

Engineering Contradiction:
Improvephase synchronization accuracyVSAvoidtotal startup time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent pre-calculates phase correction values for various initial phase error conditions and stores them in lookup tables. During startup, regardless of the initial phase error magnitude, the system retrieves the appropriate pre-computed correction value and applies it immediately, achieving accurate phase synchronization without the time penalty of gradual compensation.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent changes the control parameter from gradual phase adjustment to direct phase correction using pre-computed values. By storing multiple frequency and phase parameters in lookup tables corresponding to different operating conditions, the system can instantly switch to the correct parameters, achieving fast startup with accurate synchronization even when large initial phase errors exist.

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If frequency shifts are performed for control and compensation tasks in narrow MEMS resonance curves, then adaptability is improved, but the oscillation stability deteriorates due to collapse risk

Engineering Contradiction:
Improvefrequency control flexibilityVSAvoidoscillation stability
Core Design Contradiction:
Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The patent pre-identifies and stores stable frequency operating points within the narrow MEMS resonance curve in lookup tables. These pre-characterized frequency points represent positions where the resonance curve provides adequate stability margins. During operation, the system selects from these pre-validated frequency points rather than performing arbitrary frequency shifts, maintaining adaptability while avoiding instability.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent introduces lookup tables as an intermediary between the control system and the MEMS oscillator. The lookup tables contain pre-computed frequency and phase parameters that mediate between control requirements and physical constraints of the narrow resonance curve, enabling frequency control while maintaining oscillation stability by avoiding direct, potentially destabilizing frequency shifts.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Measurement precision

If the system waits for Lissajous lock before transmitting light beams, then scanning accuracy is improved, but the operational readiness time increases

Engineering Contradiction:
Improvescanning accuracyVSAvoidoperational readiness
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent performs preliminary synchronization preparation by pre-calculating and storing the frequency and phase parameters needed for Lissajous lock in lookup tables during system initialization or manufacturing. When the system starts up, it can immediately apply these pre-computed parameters to achieve Lissajous lock rapidly, ensuring both scanning accuracy and fast operational readiness without the traditional waiting period.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces the time required for the scanning system to achieve synchronization and become operational, allowing for quicker startup and efficient light beam transmission.

Implementation Method 1

two resonant scanning axes which are each driven at constant scanning frequency

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentUS11953676B2Fast Lissajous lock control and synchronization of scanning axes of microelectromechanical system
Publication Date: 2024.04.09 INFINEON TECHNOLOGIES AG
  • US11953676B2 patent drawing
  • US11953676B2 patent drawing
  • US11953676B2 patent drawing

AI summary

A method of synchronizing a first oscillation about a first axis with a second oscillation about a second axis includes: generating a first position signal that indicates a position of the first oscillation about the first axis; generating a second position signal that indicates a position of the second oscillation about the first axis; determining a phase difference between the first and the second position signals; comparing the phase difference to a threshold value to generate a comparison result; generating a first reference signal having a first frequency and a second reference signal having a second frequency; synchronizing the first oscillation to the first frequency and synchronizing the second oscillation to the second frequency; monitoring the comparison result; and synchronously triggering a start of the first reference signal and the second reference signal responsive to the comparison result indicating that the phase difference is less than the threshold value.