MEMS Micro Channel Structure for Gas Transport
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Solution Overview
Problem
Conventional miniaturized fluid transportation structures fail to effectively transport gases due to their design limitations, necessitating an innovative approach to overcome these bottlenecks in industrial, biomedical, and electronic applications.
Innovation Solution
A micro channel structure is manufactured using a standardized micro-electromechanical system (MEMS) process, enabling fluid transportation by driving power sources with different phases, which involves a multi-layered structure with specific etching and deposition steps to form insulation, supporting, valve, and piezoelectric layers, allowing for precise control of fluid flow.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional miniaturized fluid transportation structures are made by MEMS process and integrally formed into one piece, then manufacturing precision and structural stability are improved, but the device fails to effectively transport gases due to design limitations
Solution Approach 1:
The device is divided into functionally independent modules: a vibration layer with piezoelectric actuators for generating acoustic waves, a valve layer with independently controllable valves, and a channel structure. This segmentation allows each module to be optimized for its specific function while maintaining overall structural stability through standardized MEMS manufacturing processes.
Solution Approach 2:
The invention introduces dynamic control capabilities through independently controllable valves and piezoelectric actuators that can be activated in different phases. The valves can dynamically open/close channels and the actuators can generate controlled vibrations, enabling the device to adapt to different fluid transportation requirements while maintaining structural integrity.
2Productivity
If the structural size is miniaturized to maximize flow rate, then productivity is improved, but the device fails to be implanted to transport gas due to design limitations
Solution Approach 1:
The piezoelectric actuators generate periodic vibrations at resonant frequencies to create acoustic streaming effects that enhance gas flow through the miniaturized channels. The independently controllable valves operate in periodic cycles of opening and closing to pump fluids through the channels, maintaining high flow rates in miniaturized structures.
Solution Approach 2:
The piezoelectric actuators utilize phase transitions in electrical signals (different phases) to control the timing and sequence of valve operations and actuator activations. By applying voltages with different phases to different actuators, the device creates coordinated wave patterns that efficiently transport gases through the miniaturized channels.
3Adaptability or versatility
If driving power sources with different phases are used to achieve fluid transportation, then adaptability is improved, but device complexity increases
Solution Approach 1:
The independently controllable valves and piezoelectric actuators serve multiple functions: they can pump fluids, generate acoustic waves, control flow direction, and regulate flow rates. This multi-functionality reduces the need for separate components for each function, thereby reducing overall device complexity despite the use of multi-phase control.
4Ease of manufacture
If conventional miniaturized structures are used, then manufacturing cost is reduced, but reliability and service life are insufficient
Solution Approach 1:
The device incorporates preliminary protective measures including stress compensation structures designed into the MEMS device, protective coatings deposited during manufacturing, and pre-calibrated piezoelectric actuators with built-in stress relief features. These preliminary actions prevent reliability issues before they occur during operation, extending service life while maintaining cost-effectiveness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method results in a stable and reliable micro channel structure with increased flow rate and service life, reducing development and production costs while enabling efficient fluid transportation, including gases, in a miniaturized format.
Implementation Method 1
a piezoelectric material is deposited on the lower electrode layer to form the piezoelectric actuation layer
Data Source
AI summary
A manufacturing method of micro channel structure is disclosed and includes steps of: providing a substrate; depositing and etching to form a first insulation layer; depositing and etching to form a supporting layer; depositing and etching to form a valve layer; depositing and etching to form a second insulation layer; depositing and etching to form a vibration layer, a lower electrode layer and a piezoelectric actuating layer; providing a photoresist layer and depositing and etching to form a plurality of bonding pads; depositing and etching to from a mask layer; etching to form a first chamber; and etching to form a second chamber.