MEMS Micro-Mirror Array for Programmable Defect Detection Masks
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Solution Overview
Problem
Existing semiconductor masks for defect detection systems are limited by space constraints, require long design times, lack flexibility, and incur high hardware and maintenance costs, with inscribed masks prone to calibration deviations and reduced signal-to-noise ratios.
Innovation Solution
A programmable and reconfigurable digital micro-mirror device (DMD) with a micro-electromechanical systems (MEMS) micro-mirror array that can be adjusted to different deflection states, allowing for online or offline reconfiguration to accommodate various mask shapes and sizes, and integrated with optical elements for efficient light channeling and imaging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If inscribed semiconductor masks are used in defect detection systems, then the masks provide stable and reliable defect detection, but the masks require long design times and lack flexibility for modification
Solution Approach 1:
The patent applies the Dynamics principle by replacing static inscribed masks with a dynamic digital micromirror device (DMD) that can be reconfigured through software control. The DMD contains an array of micro-mirrors that can be individually tilted to different positions, allowing the mask pattern to be dynamically changed without physical modification. This enables the system to adapt to different defect detection requirements while maintaining reliable performance through programmable control.
2Adaptability or versatility
If multiple inscribed semiconductor masks are stored in the defect detection system, then various mask shapes and sizes can be accommodated, but space constraints limit the number of masks that can be stored
Solution Approach 1:
The patent applies the Copying principle by replacing multiple physical mask copies with a single digital micromirror device that can reproduce any mask pattern through software control. Instead of storing multiple physical masks occupying significant space, the system stores digital representations of mask patterns and uses the DMD to physically manifest them as needed. This dramatically reduces storage space requirements while maintaining the ability to use various mask shapes and sizes.
3Reliability
If inscribed semiconductor masks are used, then defect detection can be performed, but the masks require frequent calibration and incur high maintenance costs
Solution Approach 1:
The patent applies the Mechanics substitution principle by replacing the mechanical/physical inscribed mask system with a digitally controlled DMD system. The traditional mechanical mask requires physical handling, alignment, and calibration procedures that are prone to errors and require maintenance. The DMD system replaces this with electronically controlled micro-mirrors that can be precisely positioned through voltage control, eliminating the need for mechanical calibration and reducing maintenance requirements while maintaining defect detection accuracy.
4Adaptability or versatility
If custom inscribed semiconductor masks are designed, then specific defect detection requirements can be met, but the design process requires long leading time
Solution Approach 1:
The patent applies the Preliminary action principle by pre-programming the DMD with multiple mask patterns in digital form before actual defect detection begins. Instead of designing and fabricating custom physical masks when needed (which takes long lead times), the system has various mask patterns already available as digital data. When a specific defect detection requirement arises, the corresponding digital mask pattern can be immediately loaded and activated, eliminating the lengthy design and fabrication process while maintaining customization capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The DMD enables flexible and efficient defect detection with improved signal-to-noise ratios, reduced downtime, and extended system lifecycle by allowing real-time adaptation of mask shapes and sizes, while minimizing hardware requirements and maintenance costs.
Implementation Method 1
The DMD is configured to receive incoming light and reflect a first portion of the incoming light into a first light channel corresponding to the first deflection state and a second portion of the incoming light into a second light channel corresponding to the second deflection state
Implementation Method 2
The at least one optical element is configured to deflect the first portion of the incoming light to a first imaging lens in the first light channel and a second portion of the incoming light to a second imaging lens in the second light channel
Data Source
AI summary
A defect detection system includes a programmable and reconfigurable digital micro-mirror device (DMD) and at least one optical element. The DMD includes a micro-mirror array with a plurality of micro-mirrors adjustable to achieve a first deflection state or a second deflection state. The DMD is configured to receive incoming light and reflect a first portion of the incoming light into a first light channel corresponding to the first deflection state and a second portion of the incoming light into a second light channel corresponding to the second deflection state. The at least one optical element is optically coupled to the first light channel and the second light channel. The at least one optical element is configured to deflect the first portion of the incoming light to a first imaging lens and a second portion of the incoming light to a second imaging lens.