MEMS Micro-Mirror Array Beamsteering for LiDAR

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Solution Overview

Problem

Conventional active optical systems for object detection and location face challenges with increased size, weight, and power consumption as range and field of view expand, due to the need for high-powered laser sources and complex mechanical structures, which limit their practicality in mobile, maritime, airborne, and space applications.

Innovation Solution

The implementation of a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) for mechanical beamsteering, which scans a pulsed laser beam over a scene, allowing for reduced weight, size, and power consumption by segmenting and steering multiple beams of different wavelengths, and compensating for atmospheric distortions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional active optical systems use high-powered laser sources to illuminate the entire field of view for long range detection, then the detection capability and field of view are improved, but the system size, weight, and power consumption increase significantly

Engineering Contradiction:
Improvedetection capabilityVSAvoidsystem weight
Core Design Contradiction:
Measurement precisionVSWeight of moving object

Solution Approach 1:

The patent divides the field of view into multiple discrete zones and uses a micro-mirror array to selectively illuminate only the necessary zones rather than the entire field of view. This segmentation approach reduces the total laser power required while maintaining detection capability in specific regions of interest.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system applies different illumination strategies to different spatial zones within the field of view. High-powered illumination is concentrated only on zones where objects need to be detected, rather than uniformly illuminating the entire field. This local quality approach reduces overall power consumption and system weight.

Inventive Principle:
Principle #3Local quality

2Speed

If conventional systems illuminate the entire field of view with sufficient laser energy for maximum range detection, then the range and field of view are improved, but the power consumption and system complexity increase

Engineering Contradiction:
Improvedetection rangeVSAvoidpower consumption
Core Design Contradiction:
SpeedVSUse of energy by moving object

Solution Approach 1:

The micro-mirror array performs rapid periodic scanning to illuminate different zones of the field of view in sequence rather than continuously illuminating all zones simultaneously. This periodic action maintains detection capability at maximum range while significantly reducing average power consumption.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The system uses partial illumination of the field of view by activating only the specific micro-mirrors needed for current detection tasks. Rather than excessive illumination of the entire field, the system applies just enough laser energy to the necessary zones to achieve maximum detection range.

Inventive Principle:
Principle #16Partial or excessive action

3Temperature

If conventional systems use additional components to reject waste heat from high-powered laser sources, then the thermal management is improved, but the system size and weight increase

Engineering Contradiction:
Improvethermal managementVSAvoidsystem volume
Core Design Contradiction:
TemperatureVSVolume of stationary object

Solution Approach 1:

The patent extracts and removes the need for complex thermal management components by reducing the laser power requirement in the first place. By using selective zone illumination instead of full-field illumination, the system generates less waste heat that would otherwise require additional cooling components, thereby reducing system volume.

Inventive Principle:
Principle #2Taking out (Extraction)

4Ease of operation

If conventional systems use mechanical beamsteering devices to scan laser beams, then the beam steering capability is improved, but the device complexity and size increase

Engineering Contradiction:
Improvebeam steering capabilityVSAvoidmechanical structure complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent replaces traditional mechanical beamsteering devices with a micro-mirror array that uses electrostatic or electromagnetic actuation to steer laser beams. This substitution eliminates complex mechanical linkages, gears, and moving parts while maintaining precise beam steering capability, thereby reducing device complexity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system transitions from single-axis mechanical scanning to two-dimensional micro-mirror array control, enabling independent steering in both horizontal and vertical dimensions. This dimensional change allows for more flexible and precise beam steering without the mechanical complexity of multi-axis mechanical systems.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables efficient detection and location of objects at long ranges with reduced system size, weight, and power consumption, improving practicality for various applications by minimizing the need for high-powered sources and complex mechanical structures.

Implementation Method 1

a MEMS MMA positioned to receive the pulsed laser beam from the laser radar optical source and to scan the pulsed laser beam in a first scan over a first area of a scene

Methodology Applied
Scientific EffectMechanical beamsteering:

Implementation Method 2

determine a range to the first area of the scene based at least in part on a time of flight of the pulsed laser beam of the first linear scan

Methodology Applied
Scientific EffectTime of flight: Time of Flight

Implementation Method 3

Such systems detect an object by sensing reflections of laser radiation from the object

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS12066574B2Optical system for object detection and location using a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) beamsteering device
Publication Date: 2024.08.20 RAYTHEON CO
  • US12066574B2 patent drawing
  • US12066574B2 patent drawing
  • US12066574B2 patent drawing

AI summary

Optical systems and methods for object detection and location. One example of an optical system includes a laser radar optical source positioned to emit a pulsed laser beam, a MEMS MMA positioned to scan the beam in a linear scan over a first area of a scene, a laser radar detector positioned to receive and integrate a reflection of the beam, a read-out integrated circuit (ROIC) configured to provide a first read-out signal based on the integrated reflection, and a controller configured to receive the first read-out signal, determine a range to the first area based on a time of flight of the pulsed laser beam, and identify a presence of an object within the scene based on a signal level of the first read-out signal, the first signal level corresponding to a reflectivity of a portion of the object within the first area of the scene. The MEMS MMA being configurable to shape the pulsed laser beam to adjust size, focus or intensity profile or to produce deviations in the wavefront of the beam to compensate for path length differences or atmospheric distortion. The MEMS MMA being configurable to produce and independently steer a plurality of pulsed laser beams of the same or different wavelengths.