MEMS Micro-Mirror Single Actuation Coil Heat Dissipation
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Solution Overview
Problem
MEMS micro-mirror devices face issues with increased power consumption and mechanical property variations due to temperature-induced changes in torsional arm flexibility and electrical resistance, leading to undesired parasitic movements and inefficiencies in scanning performance.
Innovation Solution
A MEMS micro-mirror device with a single actuation coil extending over both torsional arms, allowing for increased heat dissipation and uniform temperature distribution, reducing electrical resistance and power consumption, and maintaining consistent mechanical properties across both arms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single actuation coil is used to oscillate the MEMS micro-mirror, then device complexity is reduced, but temperature distribution becomes uneven causing mechanical property variations
Solution Approach 1:
The single actuation coil is segmented into multiple sections: a first section extending along the first torsional arm, a second section extending along the second torsional arm, and a third section connecting them. This segmentation allows independent optimization of each coil section's position and dimensions to achieve uniform temperature distribution while maintaining mechanical stability.
Solution Approach 2:
Different sections of the actuation coil are designed with different local properties - the first and second sections have specific dimensions optimized for their respective torsional arms, while the third section has different dimensions to optimize heat distribution. This local quality variation ensures uniform temperature across all torsional arms.
2Loss of energy
If the actuation coil extends along the torsional arms, then heat dissipation increases, but electrical resistance increases leading to higher power consumption
Solution Approach 1:
The actuation coil is configured to extend in multiple spatial dimensions - along the length of the torsional arms and connecting between them through the third section. This multi-dimensional configuration increases the coil's surface area for heat dissipation while the optimized path minimizes the total wire length to control electrical resistance.
Solution Approach 2:
The coil sections have different dimensional parameters optimized for their specific functions. The first and second sections have dimensions optimized for heat dissipation along the torsional arms, while the third section has dimensions optimized for connecting the arms with minimal resistance. This parameter optimization balances heat dissipation and power consumption.
3Stability of the object's composition
If equal lengths of the actuation coil are arranged to cooperate with each torsional arm, then temperature distribution becomes uniform, but the coil geometry becomes more complex
Solution Approach 1:
The actuation coil is divided into three distinct segments: first section along the first torsional arm, second section along the second torsional arm, and third section connecting them. This segmentation enables equal length cooperation with each torsional arm while maintaining a manageable geometric structure through systematic design.
Solution Approach 2:
The actuation coil serves multiple functions simultaneously - it provides electromagnetic actuation force, dissipates heat along the torsional arms, and connects the torsional arms electrically. The third section performs the dual function of connecting the first and second sections while also contributing to heat dissipation, reducing overall geometric complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution decreases power consumption and eliminates mechanical property variations, ensuring stable and efficient scanning performance by distributing heat dissipation evenly across the actuation coil and maintaining consistent arm properties.
Implementation Method 1
A MEMS micro-mirror device comprises a MEMS micro-mirror, a support structure and, a first and second torsional arm which each connect the MEMS micro-mirror to the support structure... a single actuation coil for oscillating the MEMS micro mirror about the first oscillation axis... a magnet which is arranged such that a magnetic field generated by the magnet submerges at least the portion of the single actuation coil which cooperates with the MEMS micro mirror
Implementation Method 2
The single actuation coil is configured to extend along the first and second torsional arms... allowing for increased heat dissipation and uniform temperature distribution, reducing electrical resistance and power consumption
Data Source
AI summary
A MEMS micro-mirror device comprising, a MEMS micro-mirror, a support structure and, a first and second torsional arm which each connect the MEMS micro-mirror to the support structure, wherein the first and second torsional arms are arranged to define a first oscillation axis about which the MEMS micro-mirror can oscillate; a single actuation coil for oscillating the MEMS micro mirror about the first oscillation axis, at least a portion of the single actuation coil being arranged to cooperate with the MEMS micro mirror; a magnet which is arranged such that a magnetic field generated by the magnet submerges at least the portion of the single actuation coil which cooperates with the MEMS micro mirror; wherein the single actuation coil is configured to extend along the first and second torsional arms.