MEMS Micro-Mirror Assembly with Deformable Connection for LiDAR
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Solution Overview
Problem
Existing light steering systems, particularly in LiDAR applications, face challenges in achieving a large field of view (FOV) and detection range while maintaining the necessary scanning resolution and resolution frequency.
Innovation Solution
The implementation of MEMS micro-mirrors with piezoelectric actuators and deformable connection structures allows for a large rotation angle, thereby increasing the scanning angle and FOV, while maintaining a given resonant frequency and resolution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the micro-mirror rotation angle is increased to expand FOV and detection range, then the field of view and detection range are improved, but the scanning resolution and resonant frequency may deteriorate
Solution Approach 1:
The micro-mirror assembly is segmented into multiple independent components: the micro-mirror element, the deformable connection structure, and the support structure. This segmentation allows each component to be optimized independently - the micro-mirror can be sized for adequate aperture while the connection structure enables large rotation angles without compromising the overall system resolution
Solution Approach 2:
The patent changes the physical parameters of the connection structure, specifically making it deformable with controlled stiffness characteristics. By adjusting the connection structure's deformability and mechanical properties, the system achieves large rotation angles while maintaining the resonant frequency and scanning resolution necessary for high-quality detection
2Length of stationary object
If the micro-mirror size is increased to improve aperture and detection range, then the detection range is improved, but the rotation speed and resonant frequency may deteriorate
Solution Approach 1:
The deformable connection structure serves as an intermediary between the micro-mirror and the support structure. This intermediary element allows the micro-mirror to achieve large rotation angles and maintains adequate aperture size while the connection structure's mechanical properties are tuned to preserve resonant frequency and enable high-speed operation
Solution Approach 2:
The connection structure is designed to be dynamically deformable rather than rigid. This dynamic characteristic allows the system to accommodate large mirror rotations while maintaining the natural resonant frequency, enabling both large detection range and high rotation speed through controlled mechanical deformation
3Area of stationary object
If the rotation angle range is increased to expand FOV, then the field of view is improved, but the scanning resolution may deteriorate
Solution Approach 1:
By segmenting the assembly into micro-mirror, connection structure, and support structure, the patent allows the connection structure to be specifically designed for large angular displacement while the micro-mirror itself maintains precise optical surfaces. This segmentation resolves the contradiction between large FOV and scanning resolution
Solution Approach 2:
The patent changes the mechanical parameters of the connection structure to enable large rotation angles. By carefully controlling the stiffness, deformability, and geometric parameters of the connection structure, large field of view is achieved while the optical precision and scanning resolution are preserved through proper parameter selection
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the FOV and detection range of light steering systems, improving the capability to detect and illuminate a larger extent of a scene, while maintaining high scanning resolution and frequency.
Implementation Method 1
an actuator directly connected to the substrate and mechanically connected to an end portion of the micro-mirror and deformable in response to an electrical signal to generate a torque to rotate the micro-mirror
Data Source
AI summary
In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module of a vehicle and comprises: a semiconductor integrated circuit comprising a microelectromechanical system (MEMS) and a substrate, the MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprising: a micro-mirror; and an actuator directly connected to the substrate and mechanically connected to an end portion of the micro-mirror and deformable in response to an electrical signal to generate a torque to rotate the micro-mirror around a rotation axis to reflect light emitted by a light source out of the LiDAR module or to reflect light received by the LiDAR module to a receiver.