MEMS Micro-Mirror Array Non-Uniformity Compensation

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Solution Overview

Problem

Imaging sensors face non-uniformity issues due to manufacturing defects and environmental variations, requiring frequent calibration to maintain uniform response across their field-of-view, which can be time-consuming and computationally demanding, especially in operational settings where scene visibility is crucial.

Innovation Solution

The integration of Micro-Electro-Mechanical System (MEMS) Micro-Mirror Arrays that can tip, tilt, and piston in multiple degrees of freedom, allowing for continuous control of optical elements to focus, blur, or re-direct radiation for calibration and operational modes, enabling on-board calibration without losing scene visibility and reducing computational demands.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If traditional NUC calibration is performed using a black body source with mechanically gimballed mirror, then non-uniformity correction is achieved, but scene visibility is lost during calibration

Engineering Contradiction:
Improvenon-uniformity correction accuracyVSAvoidscene visibility loss
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The calibration function is segmented from the main imaging path by using a separate on-board black body source that can be selectively directed to the detector through the MEMS mirror array, allowing calibration without blocking the scene view during normal operation

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The MEMS mirror array provides dynamic control over the optical path, enabling rapid switching between scene imaging and calibration modes by electronically steering the black body source radiation to the detector without mechanical movement of the entire calibration system

Inventive Principle:
Principle #15Dynamics

2Loss of time

If scene-based NUC is used to maintain scene visibility, then computational demands increase significantly

Engineering Contradiction:
Improvescene visibility maintenanceVSAvoidcomputational complexity
Core Design Contradiction:
Loss of timeVSDevice complexity

Solution Approach 1:

The system performs self-calibration by using its own on-board black body source and MEMS mirror array to generate uniform radiation patterns, eliminating the need for external computational algorithms to analyze scene images for non-uniformity correction

Inventive Principle:
Principle #25Self-service

3Measurement precision

If frequent NUC calibration is performed to correct manufacturing defects and environmental variations, then operational efficiency decreases

Engineering Contradiction:
Improvesensor response uniformityVSAvoidoperational efficiency
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The MEMS mirror array enables rapid, dynamic switching between calibration and imaging modes, allowing frequent calibration cycles with minimal interruption to operational efficiency by electronically controlling the calibration source direction rather than using slow mechanical systems

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system maintains continuous operational capability by performing calibration in brief intervals without complete loss of scene visibility, keeping the imaging function active while periodically inserting calibration measurements through the controllable MEMS optical path

Inventive Principle:
Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution allows for real-time non-uniformity correction and multi-spectral imaging, maintaining scene visibility during calibration, reducing computational load, and providing precise focus adjustments for aerodynamic and thermal variations, thus enhancing the sensor's operational efficiency and accuracy.

Implementation Method 1

the mirrors are tipped and tilted such that the optical radiation is focused at the pixelated detector to read out an image of the scene

Methodology Applied
Scientific EffectOptical reflection and focusing: Reflection

Implementation Method 2

the mirrors are tipped and tilted and/or pistoned to spatially or temporally blur the image

Methodology Applied
Scientific EffectOptical defocusing: Reflection

Implementation Method 3

the mirrors are tipped and tilted and/or pistoned to spatially or temporally blur the image or to re-direct the FOV to one or more on-board calibration sources to generate a uniform image

Methodology Applied
Scientific EffectOptical redirection: Reflection

Data Source

PatentUS11483500B2Optical non-uniformity compensation (NUC) for passive imaging sensors using micro-electro-mechanical system (MEMS) micro-mirror arrays (MMAS)
Publication Date: 2022.10.25 RAYTHEON CO
  • US11483500B2 patent drawing
  • US11483500B2 patent drawing
  • US11483500B2 patent drawing

AI summary

A passive imaging sensor includes a plurality of optical elements in which at least one includes one or more Micro-Electro-Mechanical System (MEMS) Micro-Mirror Arrays (MMAs) having a plurality of independently and continuously controllable mirrors that at least tip and tilt in 2 DOF and may tip, tilt and piston in 3 DOF, In an operational mode, the mirrors are tipped and tilted, and possibly pistoned, such that the optical radiation is focused at the pixelated detector to read out an image of the scene. NUC coefficients such as offset and/or gain are applied to either the output signals of the detector or to the image to form the NUC'd images. In a calibration mode, the mirrors are tipped and tilted and/or pistoned to spatially or temporally blur the image or to re-direct the FOV to one or more on-board calibration sources to generate a uniform image from which to calculate and update the NUC coefficients.