MEMS Micro-Mirror Device with Rear Light Reception
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Solution Overview
Problem
Existing MEMS micro-mirror devices require precise positioning of multiple components to project a 2D image, which is challenging due to variations in packaging dimensions and shape, and suffer from parasitic light interference that degrades image quality.
Innovation Solution
A single package MEMS micro-mirror device with two mirrors, where at least one mirror oscillates along an axis, allowing light to be deflected from the first mirror to the second within the package, eliminating the need for precise external alignment and reducing parasitic light interference by receiving light from the rear end.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple MEMS micro-mirror devices are used to project a 2D image, then the image projection capability is achieved, but the positioning precision and alignment complexity increase significantly
Solution Approach 1:
The patent combines two micro-mirrors and their support structures into a single integrated package, eliminating the need for separate positioning and alignment of multiple devices. The first and second micro-mirrors are both mounted on the same support structure within one package, ensuring precise relative positioning without complex external alignment procedures.
2Adaptability or versatility
If multiple MEMS micro-mirror devices are used for 2D image projection, then the projection function is achieved, but the device complexity and alignment difficulty increase
Solution Approach 1:
The patent merges multiple functional components (first micro-mirror, second micro-mirror, and their support structures) into a single integrated package. This consolidation eliminates the complexity of aligning separate devices, as all components are pre-positioned relative to each other within the unified package structure.
3Ease of operation
If light is received from the front end of the MEMS device, then the optical path is straightforward, but parasitic light interference increases and degrades image quality
Solution Approach 1:
The patent inverts the conventional optical path arrangement by receiving light from the rear end of the package instead of the front end. The first micro-mirror receives light from a rear-mounted light source, deflects it to the second micro-mirror, which then projects the light forward. This inverted configuration eliminates parasitic light interference that would occur with front-end light reception.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures reliable projection of a 2D image without the need for precise manual alignment of multiple devices and minimizes parasitic light interference, resulting in improved image quality and reliability.
Implementation Method 1
both mirrors are located within the single package and are arranged such that as the at least one mirror oscillates, the light incident on the first micro-mirror can be deflected to the second mirror
Data Source
AI summary
A MEMS micro-mirror device includes, a single package; a first mirror and second mirror, wherein at least one of the mirrors is configured to oscillate along an oscillation axis; wherein both mirrors are located within the single package and are arranged such that as the at least one mirror oscillates, the light incident on the first micro-mirror can be deflected to the second mirror.