MEMS Micro-Mirror Arrays for Laser Beam Correction and Steering

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Solution Overview

Problem

Existing amplified laser devices face limitations in beam profile correction and steering due to deformable mirrors with low resolution and slow response times, which affect amplifier gain performance and atmospheric distortion compensation.

Innovation Solution

The use of Micro-Electro-Mechanical System (MEMS) Micro-Mirror Arrays (MMAs) with tip, tilt, and piston capabilities positioned on either side of the optical amplifier to correct beam profiles and steer the beam over a field-of-regard, providing high spatial resolution and fast response times.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a deformable mirror with piezo actuators is used to correct the beam profile, then the spatial intensity profile can be corrected, but the resolution is limited and response time is slow

Engineering Contradiction:

Improvebeam profile correction precisionVSAvoidresponse time

Core Design Contradiction:

Measurement precisionVSSpeed

Solution Approach 1:

The patent replaces the mechanical piezo actuator system with an electrostatic field-based MEMS system. The MEMS deformable mirror uses electrostatic forces between electrodes and the mirror surface to achieve rapid, high-resolution beam profile correction without the mechanical inertia and slow response characteristics of piezo actuators.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the actuation mechanism from mechanical displacement (piezo) to electrostatic field control (MEMS). This parameter change enables faster response times and higher resolution control of the mirror surface, directly addressing the speed and precision contradiction.

Inventive Principle:

Principle #35Parameter changes

2Reliability

If a deformable mirror is used to correct atmospheric distortion, then wavefront correction can be achieved, but the correction effectiveness is limited by mirror resolution and response time

Engineering Contradiction:

Improveatmospheric distortion compensationVSAvoidwavefront correction precision

Core Design Contradiction:

ReliabilityVSMeasurement precision

Solution Approach 1:

The patent replaces the mechanical deformable mirror system with an electrostatic MEMS system that provides superior wavefront correction capability. The electrostatic actuation mechanism enables finer control over the mirror surface, improving wavefront correction precision and overall reliability of atmospheric distortion compensation.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Ease of operation

If the entire laser device is gimballed to steer the beam, then beam steering over the field-of-regard can be achieved, but the system complexity and mechanical wear increase

Engineering Contradiction:

Improvebeam steering capabilityVSAvoidsteering system complexity

Core Design Contradiction:

Ease of operationVSDevice complexity

Solution Approach 1:

The patent replaces the mechanical gimbal steering system with an electrostatic MEMS mirror array system. The MEMS mirrors use electrostatic forces to achieve rapid, precise beam steering without mechanical moving parts, reducing system complexity and eliminating mechanical wear while maintaining full field-of-regard coverage.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

4Manufacturing precision

If smooth deformations are required across the deformable mirror surface, then the mirror can be actuated, but the correction resolution is limited

Engineering Contradiction:

Improvesurface deformation smoothnessVSAvoidcorrection resolution

Core Design Contradiction:

Manufacturing precisionVSMeasurement precision

Solution Approach 1:

The patent changes from mechanical piezo actuation to electrostatic MEMS actuation, which enables independent control of each mirror segment. This parameter change allows for high-resolution corrections while maintaining surface smoothness through electronic control, overcoming the resolution limitation imposed by mechanical smoothness requirements.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The MEMS MMAs effectively improve amplifier gain performance and compensate for atmospheric distortion by correcting wavefronts and steering beams, maintaining beam quality and power, even in the presence of time-varying distortions.

Implementation Method 1

The actuator platform and the three electrodes beneath it form a parallel plate capacitor. When actuated, the platform is displaced downward a distance that is equal to the square of the applied electric potential.

Methodology Applied

Scientific EffectElectrostatic force: Electrostatics

Data Source

PatentUS12541098B2Amplified laser device using a MEMS MMA having tip, tilt and piston capability to both correct a beam profile and steer the amplified beam

Publication Date: 2026.02.03 RAYTHEON CO

AI summary

An amplified laser device is provided with one or more Micro-Electro-Mechanical System (MEMS) Micro-Mirror Arrays (MMAs) having tip, tilt and piston capability positioned on either side of the optical amplifier to correct the profile of the beam to improve the gain performance of the optical amplifier or to compensate for atmospheric distortion while steering the amplified beam over a FOR. The MEMS MMAs may be positioned in front of, behind or on both sides of the amplifier. The MEMS MMAs can be configured to optimize the combined amplifier performance, static and time varying, and compensation for atmospheric distortion together or separately.