MEMS Micromirror Notched Fixed Frame for Optical Path Blockage

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Solution Overview

Problem

MEMS micromirrors face optical path blockage due to their own structural fixed frames during large-angle scanning, leading to partial or complete loss of laser energy and limited scanning angle range.

Innovation Solution

Optimizing the fixed frame design by transforming it from a traditional closed frame to a non-closed frame with a notch, allowing blocked light to be emitted directly from the notch without altering the processing technology of the driver and reflecting mirror.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If a closed fixed frame is used to support the MEMS micromirror, then structural stability is improved, but optical path blockage occurs during large-angle scanning

Engineering Contradiction:

Improvestructural stabilityVSAvoidoptical path blockage

Core Design Contradiction:

Stability of the object's compositionVSObject-affected harmful factors

Solution Approach 1:

The patent extracts the blocking portion of the fixed frame by introducing a notch structure. The notch removes the specific frame section that blocks the optical path while preserving the overall fixed frame structure for support, allowing light to pass through the notch during large-angle scanning without compromising structural stability.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The fixed frame is segmented by introducing a notch, dividing it into separate sections. This segmentation allows the frame to provide structural support in most areas while creating an opening for light transmission, resolving the contradiction between structural integrity and optical path clearance.

Inventive Principle:

Principle #1Segmentation

2Object-affected harmful factors

If the reflecting mirror plane protrudes from the fixed frame plane, then optical path blockage is reduced, but manufacturing complexity and cost increase

Engineering Contradiction:

Improveoptical path blockageVSAvoidmanufacturing complexity

Core Design Contradiction:

Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

Instead of making the reflecting mirror protrude from the fixed frame (adding vertical dimension complexity), the patent inverts the approach by creating a notch in the fixed frame at the same plane level. This maintains coplanarity while achieving optical path clearance, significantly reducing manufacturing complexity.

Inventive Principle:

Principle #13The other way round (Inversion)

3Object-affected harmful factors

If the distance between the reflecting mirror surface and the fixed frame is increased, then optical path blockage is alleviated, but chip area occupation increases

Engineering Contradiction:

Improveoptical path blockageVSAvoidchip area

Core Design Contradiction:

Object-affected harmful factorsVSArea of stationary object

Solution Approach 1:

Instead of increasing the distance (vertical dimension) between the mirror and frame, the patent solves the problem in the horizontal dimension by introducing a notch. This allows light to bypass the frame obstruction without requiring additional space, maintaining compact chip area while alleviating optical path blockage.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively eliminates optical path blockage, reduces chip size, and lowers processing costs while ensuring reliable support and maintaining the normal operation of the MEMS micromirror.

Implementation Method 1

the plane reflecting mirror and the driver are connected to the fixed frame through a torsion shaft

Methodology Applied

Scientific EffectTorsion: Torsion Spring

Implementation Method 2

After a laser beam is projected onto a plane reflecting mirror surface, the direction of the reflected laser beam will also change along with the torsion of the reflecting mirror surface

Methodology Applied

Scientific EffectReflection: Reflection

Data Source

PatentUS20250180889A1MEMS micromirror for alleviating optical path blockage, and preparation method therefor

Publication Date: 2025.06.05 XI AN ZHISENSOR TECH CO LTD

AI summary

The present disclosure relates to a MEMS micromirror and a preparation method therefor, in particular to a MEMS micromirror for alleviating optical path blockage, and a preparation method therefor. According to the present disclosure, on the premise of not changing the conditions of a processing technology of a driver and a reflecting mirror in the MEMS micromirror and not affecting the normal operation of the MEMS micromirror, the fixed frame is optimized from the cutting design of a MEMS micromirror wafer, the fixed frame is transformed from a traditional closed frame to a non-closed fixed frame with a notch, while ensuring reliable support, in the large- angle scanning process, emitted light blocked by the traditional fixed frame can be directly emitted from the notch, thereby completely solving the problem of blocking light beams by the fixed frame itself of the MEMS micromirror in the scanning process.