MEMS Micromotor Drive Module Asymmetric Pinion Layout

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Solution Overview

Problem

Existing drive modules for clockwork mechanisms face challenges in optimizing silicon surface usage and achieving high efficiency due to the rectangular shape of silicon chips and circular rotors, leading to large unused silicon areas and inefficient actuator arrangement.

Innovation Solution

A drive module design featuring a pinion coaxial with the rotor, arranged above the rotor with a meshing zone near the outer peripheral edge, and actuators with symmetrical parts and angularly offset pawls to minimize silicon usage and enhance efficiency, along with a manufacturing method involving etched silicon plates nested in a wafer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If rectangular silicon chips are used to maximize parts per wafer, then manufacturing efficiency is improved, but the circular rotor shape creates large unused silicon areas reducing area utilization

Engineering Contradiction:
Improveparts per waferVSAvoidsilicon area utilization
Core Design Contradiction:
ProductivityVSArea of moving object

Solution Approach 1:

The patent introduces a pinion component that is asymmetrically positioned relative to the circular rotor, with its meshing zone located closer to one edge of the rectangular silicon chip. This asymmetric arrangement allows the circular rotor and rectangular chip to coexist with minimized wasted space, as the pinion fills the gap between the circular rotor and the rectangular chip boundary.

Inventive Principle:
Principle #4Asymmetry

2Force

If actuators are made large to generate sufficient force, then driving capability is improved, but the required silicon area increases reducing overall efficiency

Engineering Contradiction:
Improveactuator driving forceVSAvoidactuator area
Core Design Contradiction:
ForceVSArea of moving object

Solution Approach 1:

The patent employs a three-dimensional rotor structure with elevated mass elements positioned above the silicon plate plane, rather than relying solely on increased actuator area. This vertical dimensionality allows the actuators to generate sufficient torque through the elevated mass distribution, reducing the required actuator area on the silicon surface.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The rotor is constructed with composite structure combining the silicon plate substrate with elevated mass elements, creating a composite rotational component. This composite design concentrates mass in strategic locations to maximize moment of inertia and driving force while minimizing the overall area occupied by the rotor and actuators on the silicon chip.

Inventive Principle:
Principle #40Composite materials

3Ease of operation

If the pinion diameter is increased to cantilever beyond the plate edge for meshing, then meshing capability is improved, but the distance from rotor edge to plate edge must be minimized increasing complexity

Engineering Contradiction:
Improvemeshing capabilityVSAvoidspatial arrangement complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent implements a nested spatial arrangement where the pinion is positioned within the boundary defined by the rotor and plate edge, with the pinion's meshing zone extending to the plate edge. The rotor, pinion, and plate edges are nested concentrically and radially, allowing the pinion to cantilever effectively while maintaining compact overall dimensions and simplified manufacturing.

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design optimizes silicon surface usage, increases the efficiency of the micromotor, and allows for modular adaptation to varying loads and assembly configurations, improving the overall performance and modularity of the drive module.

Implementation Method 1

using electrostatic actuators with interdigitated combs or 'comb drive'

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Implementation Method 2

the stylus being provided at its free end with a pawl provided to cooperate with a serrated toothing provided on the outer peripheral edge of the rotor with a view to drive it in rotation sequentially

Methodology Applied
Scientific EffectMechanical force: Mechanical Force

Implementation Method 3

as they must generate large forces

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Data Source

PatentEP1921520B1Drive module incorporating an MEMS micromotor, manufacturing process for this module, and time piece equipped with this module
Publication Date: 2009.01.28 ETA SA MFG HORLOGERE SUISSE
  • EP1921520B1 patent drawingFigure 1~2
  • EP1921520B1 patent drawingFigure 3
  • EP1921520B1 patent drawingFigure 4

AI summary

The module (13) has a plate (30) e.g. silicon wafer, of crystalline material with an upper layer in which a micro electromechanical system type micro motor (36) is engraved, where the module is in V-shape. A pinion is connected to a rotor (42), and is meshed with a wheel in a mesh area (70) situated close to a peripheral edge (72) of the plate. The rotor is arranged on the plate so as to minimize a distance between a peripheral edge of the rotor and the edge (72). Diameter of the pinion is higher than that of the rotor so as to be in cantilever relative to the plate in the area. An independent claim is also included for a method for fabricating a driving module.