MEMS Microphone Calibration Filter for Frequency Response Precision

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Solution Overview

Problem

Conventional microphone arrays face significant variations in frequency response due to process and package variations, leading to fluctuations in amplitude, phase, and group delay, particularly in the lower frequency range, which complicates precise sound wave evaluation and recording.

Innovation Solution

A circuit arrangement with a calibration filter and a control unit that selects sensor-specific control signals to adjust the frequency response of microphones, ensuring correspondence to a predefined spectral mask, thereby optimizing the frequency response and reducing deviations in amplitude, phase, and group delay.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If a low-pass filter is used to stabilize the arrangement and attenuate excessive increase in MEMS frequency response, then stability is improved, but group delay increases and frequency response precision deteriorates

Engineering Contradiction:
ImprovestabilityVSAvoidfrequency response precision
Core Design Contradiction:
Stability of the object's compositionVSManufacturing precision

Solution Approach 1:

The patent applies parameter changes by introducing a calibration filter that dynamically adjusts filter coefficients based on measured frequency response characteristics. Instead of using a fixed low-pass filter, the system measures the actual frequency response of the MEMS sensor and computes optimal filter coefficients to compensate for deviations, thereby maintaining both stability and frequency response precision across different operating conditions and device variations.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent implements feedback by measuring the actual frequency response of the sensor arrangement and using this information to adjust the calibration filter coefficients. The system continuously monitors frequency response characteristics and adapts the filter parameters accordingly, creating a closed-loop control mechanism that maintains precise frequency response while ensuring stability.

Inventive Principle:
Principle #23Feedback

2Manufacturing precision

If conventional circuit measures are used to keep variation in frequency responses low, then frequency response consistency is improved, but device complexity and manufacturing cost increase

Engineering Contradiction:
Improvefrequency response consistencyVSAvoiddevice complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent applies self-service by enabling the system to automatically measure and compensate for its own frequency response deviations. The calibration filter is configured to self-adjust based on measured characteristics, eliminating the need for complex external calibration equipment or manual adjustment procedures. This self-calibrating approach reduces device complexity while maintaining frequency response consistency.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent uses parameter changes by implementing a calibration filter with adjustable coefficients that adapt to actual sensor characteristics. Instead of using complex hardware modifications or multiple fixed filters, the system changes filter parameters dynamically based on measured frequency response, thereby achieving consistent frequency response with simpler device architecture.

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If process variation and package variation are present, then manufacturing flexibility is improved, but frequency response precision deteriorates

Engineering Contradiction:
Improvemanufacturing flexibilityVSAvoidfrequency response precision
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent applies parameter changes by implementing a calibration filter whose coefficients are adjusted based on actual measured frequency response characteristics. This allows the system to adapt to process variations and package variations in manufacturing while maintaining precise frequency response. The filter parameters are optimized for each specific device instance, compensating for manufacturing tolerances and variations.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent implements feedback by measuring the actual frequency response of each sensor arrangement and using this information to adjust calibration parameters. This closed-loop approach enables the system to compensate for manufacturing variations and achieve consistent frequency response precision across different production batches and device instances.

Inventive Principle:
Principle #23Feedback

Data Source

PatentUS10244315B2Circuit arrangement with an optimized frequency response and method for calibrating a circuit arrangement
Publication Date: 2019.03.26 INFINEON TECHNOLOGIES AG
  • US10244315B2 patent drawing
  • US10244315B2 patent drawing
  • US10244315B2 patent drawing

AI summary

In various embodiments, a circuit arrangement includes a calibration filter set up to receive a signal based on a first signal and to provide a calibrated signal, the first signal being a signal which is provided by an analog/digital converter and is based on an analog signal, the analog signal being provided by at least one sensor of a sensor arrangement, a filter arrangement set up to receive a signal based on the first signal and to provide a second signal, and a controller set up to select a sensor-specific control signal dependent on the frequency response of the sensor from a plurality of control signals and to provide the calibration filter with said signal, the calibrated signal being based on the first signal and the sensor-specific control signal and corresponding or substantially corresponding to a predefined spectral mask in a predefined frequency range.