MEMS Microphone Frame Reinforcement for Stability

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Solution Overview

Problem

Miniaturization of transducer elements for condenser microphones is limited by mechanical stability issues, particularly in thin frames that can bend and disrupt measuring accuracy due to applied forces, especially in asymmetrical diaphragms.

Innovation Solution

Incorporating a reinforcement element that connects sub-sections of the frame to maintain a fixed distance and reduce the transmission of forces to the diaphragm, allowing for further miniaturization without compromising measuring accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the frame is configured to be increasingly thin to enable miniaturization, then the transducer element size is reduced, but mechanical stability deteriorates and the frame bends under applied forces

Engineering Contradiction:
Improvetransducer element sizeVSAvoidframe mechanical stability
Core Design Contradiction:
Volume of moving objectVSStability of the object's composition

Solution Approach 1:

The frame is divided into multiple sub-sections (first sub-section, second sub-section, third sub-section, fourth sub-section) that are connected by reinforcement elements. This segmentation allows the frame to maintain thin walls for miniaturization while the distributed sub-sections connected by reinforcement elements provide the necessary mechanical stability to prevent bending under applied forces.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Reinforcement elements are added in the vertical dimension (extending from the lower edge toward the upper edge of the frame) to provide structural support. This dimensional addition strengthens the frame against bending forces without increasing the horizontal dimensions, thus enabling miniaturization while maintaining mechanical stability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Volume of moving object

If the frame is configured to be increasingly thin to enable miniaturization, then the transducer element size is reduced, but measuring accuracy deteriorates due to forces transmitted to the diaphragm

Engineering Contradiction:
Improvetransducer element sizeVSAvoiddiaphragm measuring accuracy
Core Design Contradiction:
Volume of moving objectVSMeasurement precision

Solution Approach 1:

The frame is segmented into multiple sub-sections connected by reinforcement elements, which distributes and reduces the forces transmitted to the diaphragm. This segmentation prevents excessive force transmission that would disrupt measuring accuracy while maintaining the thin frame design for miniaturization.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Reinforcement elements act as intermediary structures between the frame sub-sections, reducing the transmission of forces from the frame to the diaphragm. These reinforcement elements serve as mediators that stabilize the frame structure and prevent force transmission that would degrade measuring accuracy.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Volume of moving object

If the frame wall thickness is reduced to enable miniaturization, then the transducer element is more compact, but asymmetrical forces cause significant worsening of measuring accuracy

Engineering Contradiction:
Improvetransducer element sizeVSAvoiddiaphragm measuring accuracy under asymmetrical forces
Core Design Contradiction:
Volume of moving objectVSMeasurement precision

Solution Approach 1:

The frame is divided into multiple sub-sections (first, second, third, and fourth sub-sections) connected by reinforcement elements. This segmentation provides distributed structural support that counteracts asymmetrical forces more effectively than a continuous thin frame, maintaining measuring accuracy while enabling miniaturization with reduced wall thickness.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Reinforcement elements extend vertically from the lower edge toward the upper edge of the frame, adding structural support in the vertical dimension. This dimensional addition strengthens the frame's resistance to asymmetrical forces without increasing horizontal dimensions, thus maintaining measuring accuracy while enabling compact miniaturized design.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS10587961B2Transducer element and MEMS microphone
Publication Date: 2020.03.10 INVENSENSE INC
  • US10587961B2 patent drawing
  • US10587961B2 patent drawing
  • US10587961B2 patent drawing

AI summary

The present application relates to a transducer element (1) which comprises: a movable diaphragm (2, 2a, 2b) which has a border (4), a frame (5) to which the border (4) of the diaphragm (2, 2a, 2b) is attached, and a reinforcement element (10) which connects to one another a first sub-section of the frame (5) and a second sub-section of the frame (5) which lies opposite the first sub-section.