MEMS Microphone Mesh Plug for Interference Immunity
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Solution Overview
Problem
MEMS microphones face challenges with external interferences such as strong air flow, particles, lights, and RF/EM interference, and struggle with waterproofing due to open acoustic ports, with existing solutions like mesh filters often degrading performance, complicating manufacturing, or increasing package size.
Innovation Solution
A MEMS microphone design incorporating a mesh plug made from materials like polymer, foam plastic, or ceramic with a mesh structure, mounted within the acoustic port to filter sound pressure while maintaining package size and providing immunity to external interferences and waterproofing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a mesh filter is added at MEMS die level, then immunity to external interferences is improved, but manufacturing complexity increases and yield decreases
Solution Approach 1:
A mesh plug is introduced as an intermediary component placed in the acoustic port of the housing, separating the filtering function from the MEMS die itself. This mesh plug acts as a mediator that blocks external interferences (air flow, particles, lights, RF/EM) while allowing sound pressure to pass through to the acoustic sensor, thereby improving immunity without complicating the MEMS manufacturing process
Solution Approach 2:
The filtering function is segmented from the MEMS die and placed in the housing assembly instead. By dividing the system into separate functional components (MEMS die for sensing, mesh plug for filtering, housing for structural support), the complexity remains in the housing assembly rather than the sensitive MEMS fabrication process, improving yield while maintaining interference immunity
2Object-affected harmful factors
If a mesh filter is added at package level, then immunity to external interferences is improved, but package size increases
Solution Approach 1:
The mesh plug is nested within the existing acoustic port structure of the housing, utilizing the available space without requiring additional volume. The mesh plug fits into the acoustic port opening, effectively nesting the filtering function within the existing package footprint rather than adding external bulk
Solution Approach 2:
The mesh plug is constructed as a thin film or shell structure that provides filtering functionality without significant thickness. This thin-film approach allows the mesh to block external interferences while occupying minimal space within the acoustic port, maintaining compact package dimensions
3Object-affected harmful factors
If a mesh filter is added externally to MEMS microphone, then immunity to external interferences is improved, but application is limited to top-ported microphones
Solution Approach 1:
The mesh plug design is made universal by placing it in the acoustic port of the housing, a location that exists in all MEMS microphone packages regardless of port orientation. This universal placement strategy allows the same filtering solution to be applied to top-ported, side-ported, or bottom-ported microphones, enhancing application versatility while maintaining interference immunity
4Ease of operation
If acoustic port is kept open, then sound pressure can enter MEMS microphone chip, but waterproofing is compromised
Solution Approach 1:
The mesh plug is constructed from porous or mesh-like materials that have openings small enough to block water and particles but large enough to allow sound waves to pass through. This porous structure creates a selective barrier that maintains sound pressure transmission while providing waterproofing protection
Solution Approach 2:
The mesh plug serves as an intermediary barrier in the acoustic port that mediates between the need for open acoustic access and the need for waterproofing. It allows sound pressure to pass through while blocking water and particles, resolving the contradiction between ease of operation and reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The mesh plug effectively filters out external interferences and provides waterproofing without degrading performance, maintaining the MEMS microphone's size and reliability, while allowing sound pressure to pass through, thus enhancing the device's immunity to environmental factors.
Implementation Method 1
a mesh plug is mounted in the acoustic port, and wherein the mesh plug is made from a mesh material which has a mesh structure that is suitable for passing sound pressure to the MEMS microphone chip
Implementation Method 2
provides waterproofing without degrading performance, maintaining the MEMS microphone's size and reliability, while allowing sound pressure to pass through
Data Source
AI summary
A MEMS microphone and a manufacturing method thereof are provided. The MEMS microphone comprises a MEMS microphone chip and a housing with an acoustic port. The MEMS microphone chip is mounted in the housing, and a mesh plug is mounted in the acoustic port and made from a mesh material which has a mesh structure that is suitable for passage of sound.