Integrated MEMS Microphone and Vibration Sensor for Vocal Isolation
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Solution Overview
Problem
Conventional microphones face challenges in distinguishing between desirable vocal sounds and unwanted environmental sounds, particularly in noisy environments, due to overlapping frequency ranges, especially in low frequency ranges.
Innovation Solution
Integration of a MEMS microphone and a MEMS vibration sensor on a single die substrate, where the MEMS vibration sensor detects vocal sounds through mechanical vibrations of the skin near the vocal cords, allowing for improved vocal sound detection and elimination of unwanted environmental sounds by operating within different frequency ranges than the MEMS microphone.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional microphone is used to detect vocal sounds through air, then the microphone can capture sounds in the frequency range typical of unwanted sounds (low frequency ranges), but the microphone cannot distinguish between desirable vocal sounds and unwanted environmental sounds
Solution Approach 1:
The patent divides the sound detection function into two separate sensors: a MEMS microphone for detecting air pressure changes (vocal sounds) and a MEMS vibration sensor for detecting mechanical vibrations (unwanted environmental sounds). This segmentation allows each sensor to specialize in different detection methods, enabling the system to distinguish between desired and unwanted sounds by comparing signals from both sensors.
Solution Approach 2:
The patent introduces an intermediary processing system that receives signals from both the MEMS microphone and MEMS vibration sensor, then processes and compares these signals to generate a final output. This intermediary system acts as a mediator that filters out unwanted environmental noise by identifying and removing components that correlate with vibration sensor signals, thereby improving vocal sound detection accuracy.
2Object-affected harmful factors
If the MEMS vibration sensor is used to detect vocal sounds through mechanical vibrations, then the sensor can eliminate unwanted environmental sounds, but the sensor requires contact with the vibrating surface of the user
Solution Approach 1:
The patent merges the MEMS microphone and MEMS vibration sensor into a single integrated package that can operate in multiple modes. The system combines the advantages of both sensors by allowing the user to switch between air-based detection (microphone only) and vibration-based detection (vibration sensor only), or use both simultaneously for enhanced noise elimination, thereby maintaining ease of operation while providing versatile functionality.
Solution Approach 2:
The patent implements dynamic operation modes where the system can adapt its detection method based on environmental conditions and user needs. The system dynamically switches between using the MEMS microphone, the MEMS vibration sensor, or both together, allowing flexible operation whether the user is in a quiet environment or a noisy setting, thus maintaining ease of operation across different scenarios.
3Reliability
If both MEMS microphone and MEMS vibration sensor are integrated on a single die substrate, then the device can maximize vibration sensitivity and acoustic signal output, but the device complexity increases
Solution Approach 1:
The patent designs the integrated die substrate to support multiple functions through a single unified structure. The MEMS microphone and MEMS vibration sensor share common structural elements and processing steps, allowing the same substrate to produce both sensors with optimized performance. This multi-functional design achieves high vibration sensitivity and acoustic signal output while managing integration complexity through shared resources.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances vocal sound detection quality by selectively using mechanical vibrations to isolate desired sounds from unwanted environmental noise, improving sensitivity and reducing interference in loud environments.
Implementation Method 1
a MEMS microphone (102) that detects vocal sounds through air
Implementation Method 2
a MEMS vibration sensor (104) that detects vocal sounds based on contact with a vibrating surface of the user (e.g., portion of the neck near the user's vocal chords), in other words, mechanical vibrations
Data Source
AI summary
MEMS microphone and vibration sensor dies and packages are described. In an embodiment, a MEMS microphone and vibration sensor die includes a die substrate, a MEMS microphone on the die substrate and a MEMS vibration sensor on the die substrate. The MEMS vibration sensor may include a plurality of beams with different proof masses corresponding to different resonant frequencies, wherein the different proof masses comprise a same material as the die substrate.