MEMS Microprobe Electrode Array for Wear-Resistant Recording

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Solution Overview

Problem

Existing microprobe-based memory devices face challenges in maintaining stable contact and high recording density due to probe tip wear, leading to unreliable operation and limited density enhancement as they approach physical limits.

Innovation Solution

A MEMS memory microprobe design featuring a probe tip with alternately arranged recording or reproduction electrodes and support portions, forming a single plane that opposes the recording medium, with insulating layers to suppress electrical interference and disperse load, ensuring stable contact and reducing wear by using harder materials for electrodes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a sharpened type probe with small tip size is employed to achieve high recording density, then recording density is improved, but probe tip wear increases leading to reduced reliability

Engineering Contradiction:
Improverecording densityVSAvoidprobe tip durability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The probe tip is segmented into multiple recording electrodes arranged in an array rather than a single sharp tip. This segmentation allows the load to be distributed across multiple electrodes, reducing wear on each individual electrode while maintaining the ability to write fine recording bits through the array configuration

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention changes the fundamental parameter of probe tip geometry from a single sharp point to a planar array of multiple electrodes. This parameter change enables both high recording density (through the array configuration) and improved durability (through load distribution across multiple contact points)

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If the same load is applied to a probe with smaller tip radius, then recording bit size is reduced improving density, but wear concentration increases causing tip deterioration

Engineering Contradiction:
Improverecording bit sizeVSAvoidwear concentration
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

The load application is segmented across multiple recording electrodes in the array. Each electrode carries a portion of the total load, preventing concentration of wear at a single point while maintaining the capability to create fine recording bits through the array's overall small footprint

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Each recording electrode in the array maintains local quality with a small effective contact area for high-density recording, while the collective array structure provides distributed load bearing. The local geometry of each electrode is optimized for both precision recording and reduced wear

Inventive Principle:
Principle #3Local quality

3Reliability

If recording electrodes contact the recording medium to ensure stable operation, then recording reliability is improved, but probe tip wear accelerates

Engineering Contradiction:
Improvecontact stabilityVSAvoidprobe tip material wear
Core Design Contradiction:
ReliabilityVSLoss of substance

Solution Approach 1:

The contact interface is segmented into multiple recording electrodes that collectively contact the recording medium. This segmentation distributes the mechanical and electrical contact load across multiple points, maintaining stable contact for reliable operation while reducing wear rate through load distribution

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS8331212B2MEMS memory microprobe and recording apparatus
Publication Date: 2012.12.11 KIOXIA CORP
  • US8331212B2 patent drawing
  • US8331212B2 patent drawing
  • US8331212B2 patent drawing

AI summary

According to one embodiment, a MEMS memory microprobe includes a probe tip, a lever, and a base. The probe tip is arranged to oppose a recording medium and is brought into contact with the recording medium to perform recording or reproduction of information when a current or voltage is applied between them. In the probe tip, a plurality of electrodes used in the recording or reproduction and a plurality of support portions which form the probe tip together with the electrodes are alternately arranged, and the electrodes and the support portions form a single plane which opposes the recording medium.