MEMS Micropump Testing via Reservoir Pressure Control

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Solution Overview

Problem

Current methods for testing MEMS micropumps are inefficient and inaccurate due to their small size and low flow rate, as they cannot accurately measure the volume and flow rate of the output liquid at specific pressures, and rely on manual testing with low precision.

Innovation Solution

A MEMS micropump testing method and system using a control model based on least-square support vector machines, which controls the communication between a reservoir component and a meter to accurately measure the volume and flow rate of the output liquid by setting pressure thresholds and utilizing a radial basis function to optimize the testing process, ensuring no backflow and improved accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual testing method is used to measure MEMS micropump output, then the testing setup is simple, but the measurement precision of volume and flow rate is low

Engineering Contradiction:
Improvemeasurement precision of volume and flow rateVSAvoidtesting system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent introduces a reservoir component as an intermediary between the MEMS micropump and the measurement system. The reservoir accumulates the micropump's output liquid and allows for controlled discharge to the meter, enabling accurate measurement of small volumes that would be difficult to measure directly. This intermediary approach solves the measurement precision problem while keeping the overall system manageable in complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces manual mechanical testing operations with an automated control model based on least-square support vector machines. The control model automatically determines when to connect the reservoir to the replenish component or meter based on pressure threshold comparisons, eliminating manual intervention and improving measurement precision through consistent, repeatable automated operations.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Productivity

If conventional testing method is used, then the device structure is simple, but the productivity of testing is low

Engineering Contradiction:
Improvetesting efficiencyVSAvoidtesting system structure
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent implements continuous testing operation through automated control. The control model continuously monitors pressure in the reservoir and automatically manages the connection between the reservoir, replenish component, and meter. This continuous automated operation eliminates idle time between measurements and manual setup/teardown operations, significantly improving testing productivity while the modular system design keeps complexity manageable.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The system implements self-service through the automated control model that autonomously determines when to replenish the reservoir and when to measure its contents. The control model compares pressure values against thresholds and automatically executes the appropriate connections without human intervention, making the testing system self-managing and thereby improving productivity.

Inventive Principle:
Principle #25Self-service

3Measurement precision

If manual testing is used, then the system is easy to operate, but the accuracy of testing data is low

Engineering Contradiction:
Improveaccuracy of testing dataVSAvoidoperational simplicity
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The patent implements feedback control through the control model that continuously monitors pressure in the reservoir and uses this feedback to automatically determine the next action. The pressure value is compared against predefined thresholds, and based on this feedback, the system automatically connects the reservoir to either the replenish component or the meter. This feedback mechanism ensures high measurement accuracy while the automation handles the operational complexity.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system performs preliminary actions by pre-setting pressure thresholds and having the control model proactively manage the testing sequence. Instead of waiting for manual intervention, the control model anticipates when replenishment is needed and when measurement should occur, executing these actions automatically based on pressure conditions. This preliminary automated action ensures accurate data collection while reducing operational complexity for the user.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS12055137B2MEMS micropump testing method and system
Publication Date: 2024.08.06 SUZHOU UNIV
  • US12055137B2 patent drawing
  • US12055137B2 patent drawing
  • US12055137B2 patent drawing

AI summary

The invention provides a MEMS micropump testing method and system. The method includes building a control model based on a least-square support vector; determining the magnitude of the pressure in a reservoir component relative to a preset first and second threshold in combination with a pressure value index to obtain a determination result; reading the determination result and controlling accordingly the reservoir component to be in or out of communication with the replenish component and the meter; and obtaining testing data for the under-test micropump based on variation in the liquid in the meter. The replenish component and the reservoir component assist in MEMS micropump testing so that a small volume and flow rate of the output liquid can be tested. The volumes and flow rates of the output liquid from the MEMS micropump at different pressures can be tested by controlling the pressure in the reservoir component.