Monolithic MEMS Micropump with Segmented Piezoelectric Actuators
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Solution Overview
Problem
Existing micropump devices are limited in their ability to precisely move fluid volumes ranging from very low to high values, as they are not versatile enough to handle variable fluid amounts effectively.
Innovation Solution
A micropump device manufactured using MEMS technology with a monolithic body of semiconductor material, featuring multiple actuator elements connected to a control unit, each equipped with a piezoelectric element that alternates volume by applying an AC voltage, allowing for precise control of fluid flow through independently or grouped actuator control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a single piezoelectric element is used to drive a membrane, then the structure is simple, but the ability to precisely control variable fluid volumes from very low to high values is limited
Solution Approach 1:
The device divides the pumping function into multiple independent actuator elements (first actuator element and second actuator element), each capable of independent operation. This segmentation allows precise control of fluid volumes by selectively activating different numbers and combinations of actuator elements, enabling the system to handle variable fluid amounts from very low to high values while maintaining a relatively simple overall structure based on repeated modular units.
2Productivity
If multiple actuator elements are used to increase fluid flow capacity, then variable fluid amounts can be moved, but the device complexity increases
Solution Approach 1:
Multiple actuator elements are merged into a single integrated device structure where they share common components such as the body, fluid pathways, and control unit. The actuator elements are arranged in a compact configuration that allows them to operate simultaneously or independently, increasing fluid flow capacity while minimizing the increase in overall device complexity through shared infrastructure.
3Measurement precision
If actuator elements are controlled independently for precise flow regulation, then variable fluid volumes can be achieved, but the control system complexity increases
Solution Approach 1:
The control system is designed to dynamically adjust the operation of actuator elements based on desired fluid volume requirements. The control unit can selectively activate different numbers and combinations of actuator elements, and can also adjust their operating frequencies, providing precise control of fluid volumes from very low to high values. This dynamic control approach maintains simplicity by using a single control unit that manages multiple actuators through standardized control signals.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise regulation of fluid flow from very low to high values, with the ability to adjust flow rates by modifying the driving voltage, providing high flexibility and reliability for various applications, including microblowers and flowmeters.
Implementation Method 1
the piezoelectric element is biased by an a.c. voltage, bends in opposite directions, with alternating motion, reducing and increasing the volume of the chamber
Data Source
AI summary
A micropump device is formed in a monolithic semiconductor body integrating a plurality of actuator elements arranged side-by-side. Each actuator element has a first chamber extending at a distance from a first face of the monolithic body; a membrane arranged between the first face and the first chamber; a piezoelectric element extending on the first face over the membrane; a second chamber, arranged between the first chamber and a second face of the monolithic body; a fluidic inlet path fluidically connecting the second chamber with the outside of the monolithic body; and a fluid outlet opening extending in a transverse direction in the monolithic body from the second face as far as the second chamber, through the first chamber. The monolithic formation of the actuator elements and the possibility of driving the actuator elements at different voltages enable precise adjustment of flows, from very low values to high values.