MEMS Microspeaker Membrane Slit Design for Yield and Acoustic Performance
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Solution Overview
Problem
Current micro sound producing devices, such as MEMS microspeakers, face challenges in achieving high yield rates and performance due to limitations in design and manufacturing processes.
Innovation Solution
The implementation of a sound producing cell with a specific slit design and recess design, along with a manufacturing method that involves patterning a wafer to form trenches and holes, enhances yield rate and performance by allowing for improved acoustic transformation and stress relief during the manufacturing process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional membrane design is used in MEMS microspeakers, then the manufacturing process is simple, but the yield rate and performance are limited
Solution Approach 1:
The membrane is divided into multiple segments by introducing slit structures that extend from the edge toward the center. These slits create independent stress relief zones and allow each membrane segment to move more freely, improving both yield rate and acoustic performance without requiring complex manufacturing processes
Solution Approach 2:
The slit structures are strategically positioned at specific locations on the membrane where stress concentration occurs during manufacturing. This localized modification provides stress relief exactly where needed, improving yield rate without adding complexity to the entire membrane structure
2Power
If the membrane structure is optimized for high performance, then resonant frequency and sound pressure level improve, but manufacturing yield rate decreases
Solution Approach 1:
The slit structures are pre-formed in the membrane during the manufacturing process before the device is assembled and deployed. This preliminary stress relief prevents manufacturing defects and ensures high yield rate while maintaining the membrane's ability to achieve high resonant frequencies and sound pressure levels
3Reliability
If stress relief structures are added to the membrane, then manufacturing yield rate improves, but device complexity increases
Solution Approach 1:
The slit structures create a controlled porous-like pattern in the membrane that provides stress relief pathways. This approach improves manufacturing yield rate by preventing stress-induced defects while maintaining a relatively simple overall membrane structure that does not require complex manufacturing processes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach results in higher resonant frequencies, larger sound pressure levels, and increased yield rates by optimizing the structural integrity and manufacturing reliability of the sound producing cells.
Implementation Method 1
a MEMS microspeaker may use a thin film piezoelectric material as actuator
Data Source
AI summary
A sound producing cell includes a membrane and an actuating layer. The actuating layer is disposed on the membrane. The membrane is actuated by the actuating layer to produce sound. A plurality of holes is formed on the membrane.