MEMS Jetting Micro-Valve Sealing for Clog-Free Fluid Deposition
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Solution Overview
Problem
Conventional deposition systems face issues such as inaccuracies in droplet size and volume, solvent evaporation leading to clogging, maintenance requirements, and inefficiencies in handling gases due to large and energy-intensive components.
Innovation Solution
A non-contact deposition system using MEMS micro-valves with a piezoelectric actuating beam that seals fluid in a default position to prevent evaporation and opens selectively for deposition, featuring a jetting assembly with a micro-valve that includes an orifice plate, spacing member, and actuating beam to control fluid ejection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional deposition systems use exposed orifices for fluid dispensing, then deposition can be performed continuously, but solvent evaporation occurs leading to clogging and system failure
Solution Approach 1:
The system performs preliminary sealing of the orifice in the default state before deposition begins. The micro-valve maintains a closed position that seals the orifice, preventing solvent evaporation and clogging ahead of time. When deposition is needed, the valve is selectively opened to allow fluid ejection.
2Productivity
If conventional inkjet systems keep orifices open for fluid ejection, then deposition efficiency is maintained, but makeup fluid is lost to evaporation requiring continuous replenishment
Solution Approach 1:
The micro-valve operates with periodic opening and closing cycles. The orifice remains sealed during non-deposition periods and is opened only during brief intervals when fluid ejection is required. This periodic action minimizes fluid loss to evaporation while maintaining deposition efficiency during active periods.
3Ease of operation
If conventional gas control valves are used for gas dispensing, then gas flow can be controlled, but the devices are physically large and heavy requiring excessive electrical energy
Solution Approach 1:
The system replaces conventional mechanical gas control valves with a micro-valve actuated by a piezoelectric element. The piezoelectric actuator converts electrical signals directly to mechanical motion at the micro-scale, enabling precise gas flow control with minimal energy consumption and reduced device size and weight.
4Ease of manufacture
If conventional deposition systems use contact-based methods with surface tension, then fluid can be deposited, but droplet size and volume are inaccurate and controlled environment is required
Solution Approach 1:
The system uses pressurized fluid delivery through the micro-valve to achieve controlled fluid ejection. By regulating the pressure of the fluid supply and controlling the valve opening timing, precise droplet size and volume can be achieved without contact-based methods, eliminating the need for controlled environment evaporation chambers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system prevents fluid evaporation, reduces power consumption, allows accurate deposition of various fluids, and enables precise control over droplet size and placement, enhancing deposition efficiency and reducing maintenance needs.
Implementation Method 1
The actuating beam comprises a layer of piezoelectric material and is movable between a closed position and an open position by applying an electrical signal to the layer of piezoelectric material
Implementation Method 2
a sealing member surface of the sealing member contacts the orifice plate to seal the orifice and close the micro-valve
Implementation Method 3
A fluid manifold is coupled to the micro-valve and defines a fluid reservoir containing a pressurized fluid around the actuating beam
Data Source
AI summary
A non-contact deposition system comprises a jetting assembly including at least one micro-valve. The micro-valve includes an orifice plate defining an orifice therethrough. An actuating beam disposed in a spaced relationship to the orifice plate. The actuating beam including a base portion and a cantilevered portion extending from the base portion towards the orifice and is movable between a closed position and an open position. A sealing structure comprising a sealing member is disposed at the overlapping portion of the cantilevered portion. A fluid manifold is coupled to the micro-valve and defines a fluid reservoir containing a pressurized fluid. When the actuating beam is in the closed position, the cantilevered portion is positioned such that the sealing structure seals the orifice so as to close the micro-valve, and in the open position, the fluid is dispensed from the orifice towards a substrate and deposited thereon.