Three-Way MEMS Microvalve With Pressure-Balanced Piezo Actuation

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Solution Overview

Problem

MEMS-based microvalves face challenges with low actuation forces, limiting their ability to operate effectively at higher fluid pressures, and existing three-way microvalves require multiple two-way valves, increasing size, weight, and power consumption.

Innovation Solution

The development of three-way Micro-Electro-Mechanical Systems (MEMS)-based micro-valve devices employing piezoelectric actuation with a pressure-balancing scheme, allowing for high actuation forces and efficient fluid control with a single actuator, enabling operation at higher fluid pressures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple two-way microvalves are used to achieve three-way fluid control, then fluid direction control is enabled, but device size, weight, and power consumption increase

Engineering Contradiction:

Improvefluid direction controlVSAvoiddevice weight

Core Design Contradiction:

Adaptability or versatilityVSWeight of moving object

Solution Approach 1:

The patent combines the functionality of multiple two-way microvalves into a single integrated three-way microvalve device. The device includes a unified body with multiple fluid ports and internal passages that enable three-way fluid control through a single actuator, eliminating the need for separate valve assemblies and reducing overall device weight.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The three-way microvalve is designed as a multi-functional device that can direct fluid flow to multiple different paths using a single actuator. The valve body incorporates multiple fluid ports and internal passages that allow one actuator to control fluid distribution across several outlets, providing universal fluid control capability.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Stress or pressure

If MEMS microvalves operate at higher fluid pressures, then operational capability is improved, but actuation force requirements increase beyond available forces

Engineering Contradiction:

Improvefluid pressureVSAvoidactuation force

Core Design Contradiction:

Stress or pressureVSForce

Solution Approach 1:

The patent employs a pressure-balancing mechanism where a balance chamber is connected to the actuator. This chamber equalizes the fluid pressure acting on opposite sides of the actuator, counterbalancing the high fluid pressure forces. As a result, the actuator only needs to overcome the pressure differential rather than the full high pressure, enabling operation at elevated fluid pressures with limited actuation forces.

Inventive Principle:

Principle #8Anti-weight (Counterweight)

3Device complexity

If a single actuator is used for three-way microvalve control, then device size and power consumption are reduced, but actuation force requirements increase

Engineering Contradiction:

Improvenumber of actuatorsVSAvoidactuation force

Core Design Contradiction:

Device complexityVSForce

Solution Approach 1:

The pressure-balancing mechanism with the balance chamber counteracts the increased force requirements by equalizing fluid pressure on both sides of the actuator. This allows a single actuator to control multiple fluid paths without requiring excessive force, as the actuator primarily overcomes the pressure differential rather than the full system pressure.

Inventive Principle:

Principle #8Anti-weight (Counterweight)

Solution Approach 2:

The patent introduces a balance chamber dimension to the actuator system, creating a pressure-balancing pathway that is separate from the main fluid control paths. This additional dimensional element enables force reduction by providing a counterbalancing pressure mechanism that works in conjunction with the single actuator.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient control of fluid direction and pressure in a compact, lightweight design, suitable for various applications including medical, industrial, and aerospace, by reducing the actuation force required and increasing operational flexibility.

Implementation Method 1

employing piezoelectric actuation

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

pressure-balancing scheme, allowing for high actuation forces and efficient fluid control

Methodology Applied

Scientific EffectPressure balancing: Pascal's Law

Data Source

PatentUS11788646B1Three-way piezoelectrically-actuated microvalve device and method of fabrication

Publication Date: 2023.10.17 CORP FOR NATIONAL RESEARCH INITIATIVES

AI summary

A three-way (3-way) Micro-Electro-Mechanical Systems (MEMS)-based micro-valve device and method of fabrication for the implementation of a three-way MEMS-based micro-valve which uses a single piezoelectric actuator. The present invention has a wide range of applications including medical, industrial control, aerospace, automotive, consumer electronics and products, as well as any application(s) requiring the use of three-way micro-valves for the control of fluids. The present invention allows for the implementation of a three-way microvalve device and method of fabrication that can be tailored to the requirements of a wide range of applications and fluid types. The microvalve may employ a novel pressure-balancing scheme wherein the fluid pressure balances the actuator mechanism so that only a small amount of actuation pressure (or force) is needed to switch the state of the actuator and device from open to closed, or closed to open.