MEMS Mirror Array Hybrid Actuation for LiDAR Scanning

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Solution Overview

Problem

Existing LiDAR systems face challenges in synchronizing arrays of smaller mirrors to achieve the same directional tilt in two-dimensional scanning, as mechanical coupling is limited to one orthogonal axis due to interference.

Innovation Solution

A microelectromechanical system (MEMS) structure is employed, featuring a substrate rotated by an electromagnetic actuator about a first axis, and an array of rotatable MEMS mirrors mounted on the substrate, each capable of rotation about a second axis perpendicular to the first. A controller synchronizes the rotation of the substrate and the MEMS mirrors across the array, enabling two-dimensional scanning.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If mechanical coupling is used to synchronize mirrors in an array, then synchronization in one direction is achieved, but synchronization in the orthogonal direction is prevented due to mechanical interference

Engineering Contradiction:

Improvesynchronization of mirror tiltVSAvoidtwo-dimensional scanning capability

Core Design Contradiction:

Stability of the object's compositionVSAdaptability or versatility

Solution Approach 1:

The system divides the mirror array into independently controllable units, each with its own electromagnetic actuator. This segmentation allows each mirror to be controlled separately in both orthogonal directions without mechanical interference, resolving the contradiction between synchronization stability and two-dimensional adaptability

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent replaces mechanical coupling with electromagnetic actuators for mirror synchronization. This substitution eliminates mechanical interference while achieving precise synchronization in both orthogonal directions through electronic control, resolving the contradiction between mechanical stability and operational versatility

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Area of stationary object

If a single large mirror is used to increase optical aperture, then aperture size is improved, but operating speed is sacrificed

Engineering Contradiction:

Improveoptical apertureVSAvoidmirror operating speed

Core Design Contradiction:

Area of stationary objectVSSpeed

Solution Approach 1:

The system segments a large mirror into multiple smaller mirrors arranged in an array. Each small mirror can operate at high speed independently, while the collective array maintains the large effective aperture. This segmentation resolves the contradiction between aperture size and operating speed

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent merges multiple small mirrors into a coordinated array that functions as a single large aperture system. By synchronizing the tilting of all small mirrors through electromagnetic actuators, the system achieves both large effective aperture and high operating speed, resolving the contradiction between these two parameters

Inventive Principle:

Principle #5Merging (Combining)

3Speed

If arrays of smaller mirrors are used to maintain operating speed, then speed is preserved, but synchronization in two dimensions becomes complex due to mechanical interference

Engineering Contradiction:

Improvemirror operating speedVSAvoidsynchronization mechanism

Core Design Contradiction:

SpeedVSDevice complexity

Solution Approach 1:

The patent replaces complex mechanical coupling mechanisms with electromagnetic actuators for each mirror. This substitution simplifies the synchronization mechanism by using independent electronic control for each mirror, eliminating mechanical interference while maintaining high operating speed and achieving two-dimensional scanning capability

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution allows for efficient two-dimensional synchronization of MEMS mirrors, enhancing the performance of LiDAR systems by increasing the effective optical aperture without sacrificing operating speed.

Implementation Method 1

an electromagnetic actuator configured to rotate the substrate about a first axis of rotation

Methodology Applied

Scientific EffectElectromagnetic force: Lorentz Force

Data Source

PatentUS12209011B2Hybrid driving for large aperture tilting mirrors

Publication Date: 2025.01.28 SHANGHAI INSYNC RESONANCE TECHNOLOGY CO

AI summary

A microelectromechanical system MEMS structure is described. A first actuator is attached to a substrate and configured to rotate the substrate along a first axis of rotation. An array of rotatable MEMS mirrors is mounted on the substrate, aligned parallel to the first axis of rotation. Each rotatable MEMS mirror is rotatable about a second axis of rotation with each second axis of rotation being perpendicular to the first axis of rotation and parallel to every other axis of rotation. An array of second actuators is configured to rotate each of the rotatable MEMS mirrors about its corresponding second axis of rotation. A controller is configured to control the first actuator to rotate the substrate about the first axis of rotation. The controller further controls the array of second actuators to rotate each rotatable MEMS mirror of the array of rotatable MEMS mirrors about its corresponding second axis of rotation.