MEMS Mirror Attenuation Layer for LiDAR Static Reflection
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Solution Overview
Problem
LiDAR systems face challenges in reducing the intensity of statically reflected light to meet performance and safety requirements, as the beam's outer edges are reflected off a substrate adjacent to the mirror, creating regions of high light intensity that can exceed safety standards.
Innovation Solution
A micro-electromechanical system (MEMS) package with a manipulable mirror and an adjacent substrate featuring an attenuation layer, such as an anti-reflective coating, diffraction grating, or absorbing coating, to attenuate the intensity of the statically reflected light beam, optimizing the LiDAR system's performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the beam diameter is increased to improve LiDAR detection coverage, then the detection area is improved, but the outer edges of the beam are reflected off the substrate creating regions of statically reflected light that increase light intensity and violate safety requirements
Solution Approach 1:
An attenuation layer is introduced as an intermediary element between the substrate and the outgoing light beam. This layer selectively attenuates the statically reflected light from the beam's outer edges while allowing the main reflected beam to pass through, thereby reducing harmful static reflection intensity without compromising detection area coverage
Solution Approach 2:
The attenuation layer is positioned specifically adjacent to the mirror where it interacts only with the outer edges (tail portion) of the light beam. This localized application ensures that only the problematic statically reflected light is attenuated, while the central portion of the beam that carries the useful LiDAR signal remains unaffected
2Object-affected harmful factors
If the intensity of statically reflected light is reduced to meet safety requirements, then safety compliance is improved, but the overall light beam intensity may be reduced affecting LiDAR performance
Solution Approach 1:
The attenuation layer is strategically positioned to interact only with the outer edges of the light beam where static reflection occurs. By applying attenuation locally rather than globally, the solution reduces harmful static reflection intensity while preserving the intensity of the main beam that carries the useful LiDAR signal, thus maintaining both safety compliance and system performance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The attenuation layer effectively reduces the intensity of statically reflected light, ensuring compliance with safety standards and enhancing LiDAR system performance by minimizing regions of high light intensity.
Implementation Method 1
an attenuation layer is disposed on a top surface of the substrate that attenuates an intensity of a reflection of the emitted light beam from the attenuation layer
Implementation Method 2
the attenuation layer comprises a diffraction grating
Implementation Method 3
the attenuation layer comprises an anti-reflective coating
Data Source
AI summary
Methods and systems for using a MEMS mirror for steering a LiDAR beam and for minimizing statically emitted light from a LiDAR system are disclosed. A LiDAR system includes a light source that emits a light beam directed at a MEMS device. The MEMS device includes a manipulable mirror that reflects the emitted light beam in a scanning pattern. The MEMS device also includes a substrate positioned adjacent to and at least partially surrounding the mirror. An attenuation layer is disposed on a top surface of the substrate and is configured to attenuate light reflected by the substrate.