MEMS Mirror Beam Layout for Larger Optical Scanning Angle
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Solution Overview
Problem
The optical scanning devices in existing technologies, such as those disclosed in PTL 1, require wider torsion bars to accommodate wires, which limits the optical scanning angle.
Innovation Solution
The MEMS mirror device incorporates a movable member with twist beams and meander beams, where wires are formed only on the meander beams, reducing the width of the twist beams and allowing for a larger optical scanning angle.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If wires are formed on the torsion bar to connect movable plates, then electrical connection is achieved, but the width of the torsion bar must be increased
Solution Approach 1:
The patent divides the beam structure into functionally distinct components: twist beams dedicated to mechanical rotation and meander beams dedicated to wire routing. This segmentation allows each component to be optimized for its specific function without compromise, resolving the contradiction between wire accommodation and torsion bar width.
Solution Approach 2:
The patent extracts the wire routing function from the torsion bar structure by introducing separate meander beams. This extraction eliminates the need to increase torsion bar width for wire accommodation, while the twist beams remain dedicated to providing rotational torque and movement.
2Ease of operation
If the width of the torsion bar is increased to accommodate wires, then wire routing is enabled, but the optical scanning angle becomes smaller
Solution Approach 1:
By segmenting the beam into twist beams and meander beams with distinct functions, the patent enables wire routing through meander beams without compromising the rotational capability of twist beams, thereby maintaining a large optical scanning angle.
Solution Approach 2:
The patent resolves the spatial conflict by utilizing different dimensional configurations: meander beams route wires in a folded pattern along the beam length, while twist beams provide rotational movement in a different dimensional plane, allowing both functions to coexist without interfering with each other.
3Reliability
If wires are formed on the twist beam, then electrical connection is provided, but stress on wires increases causing deterioration or breakage
Solution Approach 1:
The patent segments the beam structure so that meander beams carry wires while twist beams provide mechanical rotation. This separation ensures wires are positioned on beams experiencing minimal stress during rotation, preventing wire deterioration and breakage while maintaining electrical connection reliability.
Solution Approach 2:
The patent extracts the wire-carrying function from the high-stress twist beam and relocates it to meander beams that are positioned to experience minimal stress during operation, thereby protecting wire integrity while maintaining electrical connectivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables a larger optical scanning angle and improves the reliability of the device by reducing stress on the wires, preventing deterioration or breakage, and ensuring more stable operation.
Implementation Method 1
the at least one first wire is formed on the at least one first meander beam
Implementation Method 2
at least one first twist beam connected to the movable plate, and at least one first meander beam connected to the movable plate. The longitudinal direction of the at least one first twist beam is in a first direction
Data Source
AI summary
The MEMS mirror device includes a fixed member, a movable member rotatably coupled to the fixed member, a mirror, and a wire. The movable member includes a movable plate, a twist beam, and a meander beam. The meander beam is arranged along the twist beam. The mirror is formed on the movable plate. The wire extends from the movable plate to the fixed member. The wire is formed on the meander beam.