MEMS Mirror Beam Structure for Wide-Angle Distance Measurement
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Solution Overview
Problem
Existing MEMS devices for distance measurement have limitations in widening the range and improving the accuracy of distance measurement.
Innovation Solution
A MEMS device is designed with a mirror, an actuator, and a complex beam structure that includes a ring-shaped beam and snake beams, allowing for increased path length and number of bends, thereby enhancing the optical deflection angle and measurement range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a simple beam structure is used, then the device complexity is low, but the optical deflection angle and measurement range are limited
Solution Approach 1:
The beam structure is divided into multiple segments (first beam, ring-shaped beam, second beam, third beam) that can independently deform and contribute to the optical deflection. This segmentation allows each beam to be optimized for specific functions while collectively achieving large deflection angles without requiring a monolithic complex structure.
Solution Approach 2:
The ring-shaped beam introduces a dimensional element that connects the first and second beams in a non-linear configuration. This dimensional addition enables the structure to achieve greater optical deflection by utilizing multiple deformation modes across different spatial dimensions, transforming the simple linear beam path into a multi-dimensional deformable structure.
2Length of moving object
If the path length and number of bends are increased, then the measurement range is widened, but the mechanical interference increases
Solution Approach 1:
Different portions of the beam structure have different structural qualities optimized for their specific functions. The first beam is optimized for horizontal rotation with specific flexibility, the ring-shaped beam provides structural support and dimensional connectivity, the second beam handles vertical rotation, and the third beam (snake beam) provides extended path length with controlled bends. This local optimization allows long path lengths without uniform mechanical interference throughout the entire structure.
Solution Approach 2:
The beam structure is designed to be dynamically flexible rather than rigid, allowing each beam segment to deform independently during operation. This dynamic characteristic enables the long path length to adapt to mechanical stresses and interference forces, maintaining measurement accuracy by absorbing disturbances through controlled deformation rather than transmitting them rigidly across the entire structure.
3Measurement precision
If a complex beam structure with snake beams is used, then the measurement accuracy is improved, but the manufacturing complexity increases
Solution Approach 1:
The complex beam structure is segmented into four distinct beam types (first beam, ring-shaped beam, second beam, third beam), each with standardized connection interfaces. This segmentation allows each beam to be manufactured separately using optimized processes for its specific geometry, then assembled through standardized connections, reducing overall manufacturing complexity compared to fabricating a single monolithic complex structure.
Solution Approach 2:
The four separate beams are merged through standardized connection points to form the complete measurement structure. This merging approach allows the complex functionality to be achieved by combining simpler, standardized components rather than manufacturing one highly complex integrated structure, thereby improving ease of manufacture while maintaining measurement accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The enhanced beam structure increases the optical deflection angle, allowing for a wider range of distance measurement and improved accuracy, while also suppressing mechanical interference and maintaining stability in resonant operation.
Implementation Method 1
both ends of the third beam are connected to the actuator individually
Implementation Method 2
a mirror
Implementation Method 3
a path length L from the first connection part to the second connection part and from the first connection part to the third connection part along the third beam is greater than L0
Data Source
AI summary
The accuracy of distance measurement is improved, for example.The MEMS device includes a mirror, an actuator, a first beam extending in a direction of a horizontal rotation axis and connected to the mirror, a ring-shaped beam connected to the first beam, a second beam extending in a direction of a vertical rotation axis and connected to the ring-shaped beam, and a third beam having a first connection part positioned substantially in the middle thereof, the third beam further having a second connection part and a third connection part positioned at both ends thereof, the third beam being connected to the second beam via the first connection part. Both ends of the third beam are connected to the actuator individually via the second connection part and the third connection part. In a case where L0 denotes a minimum distance from the first connection part to the second connection part and from the first connection part to the third connection part as connected by a line substantially parallel to the horizontal rotation axis and by a line substantially parallel to the vertical rotation axis, and where N0 represents the number of bends of approximately 90 degrees each, a path length L from the first connection part to the second connection part and from the first connection part to the third connection part along the third beam is greater than L0, and the number of bends N is larger than N0.