Multi-faceted MEMS Mirror Chevron Scanning

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Solution Overview

Problem

Existing LIDAR systems face challenges such as high cost, large size, and power inefficiency due to the need for multiple components and precise alignment, which are exacerbated by limited packaging space in vehicles and vulnerability to vibrations.

Innovation Solution

A multifaceted MEMS reflector with a chevron pattern of mirror surfaces oriented at varying angles, supported by a moving mechanism that allows for pivotal movement, enabling efficient two-dimensional scanning with reduced components and power loss, while maintaining stability against vibrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If two-dimensional scanning MEMS mirrors are used to achieve adequate field of view, then scanning coverage is improved, but vibration stability deteriorates

Engineering Contradiction:
Improvefield of view coverageVSAvoidvibration stability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent divides the scanning function into two independent one-dimensional MEMS mirrors, each handling one dimension of scanning. This segmentation allows each mirror to be optimized for vibration resistance while collectively achieving two-dimensional scanning coverage, resolving the contradiction between field of view and vibration stability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent combines multiple laser sources with respective mirrors into an integrated system where each laser-mirror pair operates independently. This merging allows the system to achieve adequate field of view through coordinated operation while maintaining the vibration stability of individual one-dimensional mirrors.

Inventive Principle:
Principle #5Merging (Combining)

2Adaptability or versatility

If multiple laser sources and respective mirrors are used to achieve adequate field of view with one-dimensional MEMS mirrors, then field of view coverage is improved, but device complexity increases

Engineering Contradiction:
Improvefield of view coverageVSAvoidcomponent duplication
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent designs each laser-mirror assembly to be a universal module that can be replicated. Each module performs the same function (one-dimensional scanning in its specific dimension), allowing the system to achieve comprehensive field of view coverage through modular replication rather than complex custom-designed components.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent segments the overall scanning system into independent one-dimensional modules, each handling a specific scanning dimension. This segmentation simplifies the design of individual components while the coordinated operation of multiple modules achieves the required two-dimensional field of view coverage.

Inventive Principle:
Principle #1Segmentation

3Manufacturing precision

If additional optical components are used for alignment in scanning LIDAR systems, then alignment precision is improved, but device complexity increases

Engineering Contradiction:
Improvealignment accuracyVSAvoidnumber of optical components
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent employs self-aligning mechanisms where the optical components are designed to automatically align through mechanical constraints and geometric relationships. This self-service approach achieves precise alignment without requiring additional active alignment components or complex adjustment mechanisms.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent replaces complex optical alignment mechanisms with simplified mechanical mounting structures that provide inherent alignment. By using precision-machined mechanical interfaces, the system achieves the required alignment accuracy without additional optical alignment components.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides a cost-effective, compact, and power-efficient LIDAR system capable of high-frequency scanning, suitable for automated vehicles, with improved stability and coverage in both vertical and horizontal dimensions.

Implementation Method 1

a source configured to emit a laser beam and a multifaceted MEMS reflector coupled to the source and having a chevron pattern including a plurality of mirror surfaces

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentEP3489716B1Multi-faceted MEMS mirror device useful for vehicle lidar
Publication Date: 2023.07.05 APTIV TECHNOLOGIES LTD
  • EP3489716B1 patent drawingFigure 1
  • EP3489716B1 patent drawingFigure 2
  • EP3489716B1 patent drawingFigure 3

AI summary

An illustrative example MEMS device for a vehicle LIDAR comprises a mult-faceted reflector 24 which includes a base 40 and a plurality of mirror surfaces 42 supported on the base 40. The plurality of mirror surfaces 42 are respectively in a fixed position relative to the base 40. The plurality of mirror surfaces 42 are at respective angles relative to a reference 44. The respective angles of at least some of the mirror surfaces 42 are different from the respective angles of at least some others of the mirror surfaces 42. The mirror surfaces 42 may be arranged in a chevron pattern including a plurality of chevrons 50-62. The peak of each chevron is centered on the reflector 24 and the chevrons are symmetric about the longitudinal center of the reflector 24. Compared to a two-dimensional scanning MEMS mirror the reflector 24 spreads the beam 98 to cover the required vertical field, for example, so that only one direction of scanning (e.g., horizontal) is required to achieve scanning to cover a two-dimensional field of view or beam range. The reflector 24 provides the stability and advantages of a one-dimensional MEMS mirror while also achieving the type of coverage that is possible with two-dimensional devices as a moving mechanism moves the reflector 24 about the axis 30 at a high frequency.