MEMS Mirror Composite Reinforcement for Large Deflection
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Solution Overview
Problem
Existing optical scanners using MEMS mirrors face challenges in achieving high precision scanning due to significant dynamic distortion when attempting to achieve large optical deflection angles, which limits their ability to perform accurately.
Innovation Solution
The optical scanner incorporates a mirror portion with a reinforcement portion made of a material having a lower density and higher Young's modulus than the base plate, with the reflective surface located on the reinforcement portion, reducing dynamic distortion and allowing for larger optical deflection angles while maintaining precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the mirror portion is largely oscillated to achieve a large optical deflection angle, then the optical deflection angle is improved, but dynamic distortion of the mirror portion increases
Solution Approach 1:
The mirror portion is constructed as a composite structure with a base plate portion and a reinforcement portion made of different materials. The reinforcement portion has higher Young's modulus and lower density than the base plate, creating a composite material structure that reduces dynamic distortion while enabling large oscillation angles for achieving large optical deflection angles.
Solution Approach 2:
The reinforcement portion is strategically positioned on the mirror portion to locally enhance stiffness where needed. This local quality improvement allows the mirror to maintain precision during large oscillations without requiring uniform thickening of the entire structure, thus reducing overall mass while improving scanning precision.
2Speed
If the mirror portion is largely oscillated to achieve a large optical deflection angle, then the optical deflection angle is improved, but the mass of the mirror portion increases
Solution Approach 1:
The composite structure uses a reinforcement portion with lower density than the base plate material. This allows local stiffening to enable large oscillation angles while the lower density of the reinforcement material prevents significant mass increase, resolving the contradiction between achieving large optical deflection angles and maintaining low mirror portion mass.
Solution Approach 2:
The invention changes the material parameters (Young's modulus and density) of the reinforcement portion to optimize the mass-stiffness relationship. By selecting materials with specific parameter combinations (higher Young's modulus, lower density), the mirror can achieve large oscillation angles with minimal mass increase.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design significantly reduces dynamic distortion, enabling high precision scanning with reduced mass and maintaining scanning accuracy even at larger oscillation angles, thus improving the performance of optical scanners.
Implementation Method 1
The driving portion 111 has a piezoelectric element. When a voltage is applied to the driving portion 111, the piezoelectric element of the driving portion 111 causes bending deformation in a portion of the base plate 110 in proximity to the driving portion 111.
Implementation Method 2
a reflective surface configured to reflect incident light
Data Source
AI summary
There is provided an optical scanner, and an image forming apparatus and an image display apparatus which have the optical scanner. The optical scanner includes a mirror portion having a base plate portion, and a reflective portion which is adhered to a surface of the base plate portion; and a torsion beam portion which is connected to the mirror portion, made of a same material as the base plate portion and integrally formed with the base plate portion, and which is configured to be torsionally vibrated. The reflective portion includes a reinforcement portion and a reflective surface. The reinforcement portion is made of material having a density lower than that of the base plate portion and a Young's modulus greater than that of the base plate portion. The reflective surface is formed on a surface of the reinforcement portion and is configured to reflect the incident light.