Resonance MEMS Mirror Control via Current Direction Detection

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Solution Overview

Problem

Traditional control circuitry for MEMS mirrors is complex and slow to detect changes in mirror resonance frequency due to varying laser light power, necessitating a simplified control system for efficient operation.

Innovation Solution

A control circuit and method that includes timing circuitry for generating activation pulses, amplifier circuitry for receiving control signals, and detection circuitry to detect current changes in the MEMS mirror, allowing for precise termination of pulses based on current direction detection, thereby simplifying the control of resonance MEMS mirrors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional driving control circuitry is used for MEMS mirror devices, then the mirror can be controlled to operate, but the control system becomes complex requiring A/D converters, amplifiers, and filters for monitoring the mirror

Engineering Contradiction:
Improvemirror operation controlVSAvoidcontrol circuitry complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts and eliminates unnecessary components from the traditional control circuitry. By using direct digital driving methods and simplified monitoring circuits, it removes the need for A/D converters, complex amplifiers, and filters, thereby reducing device complexity while maintaining reliable mirror operation control

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent replaces complex electronic control mechanisms with simplified digital control methods. By using direct digital-to-analog conversion and simplified signal processing, it substitutes complex circuitry with more efficient control algorithms and simpler hardware implementations

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If traditional control algorithms are used, then the mirror can be monitored, but the system is slow to detect and accommodate changes in mirror resonance frequency caused by varying laser light power

Engineering Contradiction:
Improvemirror monitoringVSAvoiddetection speed
Core Design Contradiction:
ReliabilityVSSpeed

Solution Approach 1:

The patent implements dynamic control algorithms that continuously adapt to changing resonance frequencies. By using real-time frequency tracking and adaptive pulse generation, the system can quickly detect and respond to frequency shifts caused by varying laser power, maintaining optimal mirror operation under dynamic conditions

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent incorporates feedback mechanisms that monitor mirror position and resonance frequency in real-time. By using this feedback to continuously adjust control parameters and pulse timing, the system rapidly accommodates frequency changes without the delays inherent in traditional control algorithms

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed solution reduces circuit complexity and increases operational speed by efficiently controlling the activation pulses based on current direction changes, enhancing the performance of MEMS mirrors in various applications.

Implementation Method 1

amplifier circuitry configured to receive a first control signal from the timing circuitry and, responsive thereto, to generate a first set of activation pulses for operating the MEMS mirror

Methodology Applied
Scientific EffectElectrical amplification:

Implementation Method 2

detection circuit configured to detect current at the MEMS mirror and to generate a reset signal in response to detecting a change in the direction of the current at the MEMS mirror

Methodology Applied
Scientific EffectElectrical current detection:

Implementation Method 3

Many of these MEMS devices comprise two types of electro-static mirrors: in-plane mirrors and staggered mirrors

Methodology Applied
Scientific EffectElectro-static force: Electrostatics

Data Source

PatentUS10838196B2Resonance MEMS mirror control system
Publication Date: 2020.11.17 STMICROELECTRONICS INT NV
  • US10838196B2 patent drawing
  • US10838196B2 patent drawing
  • US10838196B2 patent drawing

AI summary

A method for controlling operation of a MEMS mirror includes steps for: generating activation pulses for operating the MEMS mirror and generating a window activation signal for current detection, with the window activation signal overlapping with an end of an activation pulse. The method also includes detecting current through a stator or a rotor of the MEMS mirror during the window activation signal and terminating a current activation pulse and the window activation signal in response to detecting a change in the direction of the current through the stator or the rotor of the MEMS mirror during the window activation signal.