MEMS Mirror Drive Frequency Synchronization for Multi-Sensor Distance Measurement

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Solution Overview

Problem

In scanning-type distance measuring devices using MEMS mirrors, individual differences in resonance frequencies due to manufacturing variations cause synchronization issues among multiple sensors, making it difficult to coordinate measurement timings across sensors.

Innovation Solution

A system where a master sensor generates a master clock and transmits it to other sensors, allowing all sensors to operate at the same drive frequency, with a control device determining the drive frequency based on collected voltage data to synchronize the scanning of laser beams across sensors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If each sensor operates at its own resonance frequency, then measurement precision is improved, but synchronization between sensors deteriorates

Engineering Contradiction:
Improvedistance measurement precisionVSAvoidsynchronization reliability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The system performs preliminary determination of resonance frequencies for all MEMS mirrors before actual distance measurement. The control device collects drive voltages at multiple frequencies, determines resonance frequencies in advance, and stores this information for use during synchronized operation, enabling both precise individual operation and coordinated multi-sensor measurement

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The control device adjusts drive frequencies of individual MEMS mirrors based on their determined resonance frequencies. By changing the operating frequency parameter of each sensor to match its specific resonance frequency, the system maintains high measurement precision while achieving synchronization through coordinated frequency selection rather than uniform frequency operation

Inventive Principle:
Principle #35Parameter changes

2Reliability

If a common drive frequency is used for all sensors, then synchronization is improved, but measurement precision deteriorates

Engineering Contradiction:
Improvesynchronization reliabilityVSAvoiddistance measurement precision
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The system dynamically adjusts the drive frequency of each MEMS mirror based on its individually determined resonance frequency. Rather than using a fixed common frequency, the control device selects optimal frequencies for each sensor from a range of possibilities, enabling both synchronization and high precision measurement by adapting frequencies to individual sensor characteristics

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The control device performs multiple functions: it determines resonance frequencies for all MEMS mirrors, stores this calibration data, and uses it to coordinate drive frequencies during operation. This universal control mechanism enables the system to achieve both individual optimization and collective synchronization through a single coordinated approach

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Measurement precision

If resonance frequency determination is performed for each sensor, then measurement precision is improved, but device complexity increases

Engineering Contradiction:
Improvedrive frequency accuracyVSAvoidcontrol system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The control device consolidates the resonance frequency determination process into a single centralized operation that characterizes all MEMS mirrors simultaneously. By merging the calibration function into one coordinated process rather than requiring separate adjustment for each sensor, the system reduces operational complexity while maintaining accurate frequency knowledge for precision measurement

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

Each MEMS mirror's resonance frequency is determined through its own response characteristics during the calibration process. The system automatically identifies resonance frequencies by analyzing drive voltage responses at multiple frequencies, eliminating the need for manual adjustment or complex external measurement equipment, thereby reducing device complexity while achieving accurate frequency determination

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables synchronized distance measurement operations across multiple sensors, ensuring accurate and simultaneous distance measurement from different directions by adjusting drive frequencies and voltages to match resonance frequencies, thereby overcoming synchronization challenges.

Implementation Method 1

a MEMS mirror that controls an emission direction of a laser beam

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

the emission direction of the laser beam within the measurement range is swung by resonating the MEMS mirror with a resonance frequency

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentUS10571568B2Distance measuring device, distance measuring method, and non-transitory computer-readable storage medium
Publication Date: 2020.02.25 FUJITSU LTD
  • US10571568B2 patent drawing
  • US10571568B2 patent drawing
  • US10571568B2 patent drawing

AI summary

A distance measuring device executes a collection process that includes driving a MEMS mirror in each of a plurality of sensors and collecting a drive voltage of the MEMS mirror satisfying a given condition, executes a drive frequency determination process that includes determining a drive frequency of the MEMS mirror when measuring distances by the plurality of sensors based on the drive voltage of the MEMS mirror, and executes a control signal generation process that includes generating and transmitting a control signal to the plurality of sensors, the control signal including configuration information specifying the drive frequency as a drive frequency of the MEMS mirror in each of the plurality of sensors, the configuration information including the drive frequency determined by the drive frequency determination process.