MEMS Mirror Assembly With Dual Electric Field Segmentation
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Solution Overview
Problem
Current Micro-Electro-Mechanical System (MEMS) mirror assemblies face challenges in efficiently rotating micro-mirrors to adjust laser beams for various applications, such as imaging and display, due to limitations in precise control and energy efficiency.
Innovation Solution
A mirror assembly design incorporating a mirror, first and second rotation electrodes, and opposing electrodes to create electric fields that drive the mirror to rotate around a central axis, with a supporting rotation structure for stability and energy-efficient operation, allowing for independent control of multiple mirror assemblies in an array.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional single electric field configuration is used to rotate the mirror, then the structure is simple, but the control precision and energy efficiency are insufficient
Solution Approach 1:
The single electric field configuration is segmented into two independent electric fields (first electric field with first and second electrodes, second electric field with third and fourth electrodes). Each electric field independently controls one rotation electrode, enabling precise control of mirror rotation angle and direction while maintaining energy efficiency through selective activation of electrode pairs.
Solution Approach 2:
The system dynamically switches between different electric field configurations by selectively activating electrode pairs. The controller can independently control the first and second electric fields to rotate the first and second rotation electrodes respectively, allowing dynamic adjustment of mirror orientation with high precision and energy efficiency.
2Measurement precision
If multiple electrodes are added to improve control precision, then the control precision improves, but the energy consumption increases
Solution Approach 1:
The controller activates electrode pairs periodically and selectively based on the required mirror orientation. Only the necessary electric field (first or second) is activated at any given time, allowing the mirror to achieve precise rotation control while minimizing energy consumption by avoiding simultaneous activation of all electrodes.
Solution Approach 2:
Different electrode pairs are activated based on the local control requirements for mirror rotation. The system applies electric fields locally to specific rotation electrodes only when needed, enabling precise control of mirror orientation while reducing overall energy consumption by avoiding unnecessary activation of all electrodes.
3Reliability
If the mirror rotation is driven by a single rotation electrode, then the structure is simple, but the rotation stability and energy efficiency are insufficient
Solution Approach 1:
The single rotation drive is segmented into two independent rotation electrodes (first rotation electrode controlled by first electric field, second rotation electrode controlled by second electric field). This segmentation allows independent control of rotation phases, improving rotation stability while maintaining structural simplicity through modular electrode and rotation electrode design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and energy-efficient rotation of micro-mirrors for adjusting laser beams, enhancing applications in imaging, display, and other technologies by improving control and reducing energy consumption.
Implementation Method 1
a first electrode and a second electrode are opposite to each other to form a first electric field, and the first rotation electrode is between the first electrode and the second electrode so that the first rotation electrode is in the first electric field
Implementation Method 2
a third electrode and a fourth electrode are opposite to each other to form a second electric field, and the second rotation electrode is between the third electrode and the fourth electrode so that the second rotation electrode is in the second electric field
Implementation Method 3
the first rotation electrode and the second rotation electrode are configured to rotate under a control of the first electric field and the second electric field, to drive the mirror to rotate around the rotation axis
Data Source
AI summary
A mirror assembly, a control method thereof and a light adjusting board are provided. The mirror assembly includes a mirror, a first rotation electrode, a second rotation electrode, a first electrode, a second electrode, a third electrode and a fourth electrode. The mirror includes a rotation axis; the first rotation electrode and the second rotation electrode are respectively at two sides of the rotation axis; the first electrode and the second electrode are opposite to form a first electric field; the first rotation electrode is between the first electrode and the second electrode; the third electrode and the fourth electrode are opposite to form a second electric field; the second rotation electrode is between the third electrode and the fourth electrode; the first rotation electrode and the second rotation electrode rotate under the two electric fields to drive the mirror to rotate around the rotation axis.