MEMS Mirror Dynamic Focus and Zoom for Microscopes

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Solution Overview

Problem

Conventional microscopes face challenges with slow and inaccurate focusing, vibration issues, and the inability to perform high-speed imaging due to traditional focusing mechanisms that require sample translation and discrete magnification changes, limiting their use in observing dynamic biological processes.

Innovation Solution

A dynamic focus and zoom system utilizing three electronically controlled MEMS mirrors within a housing, allowing independent adjustment of focus and magnification without moving parts, maintaining optical resolution and enabling continuous control over focusing and zoom.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If traditional focusing mechanisms translate the sample stage up and down, then focus can be changed, but the sample is agitated and vibration occurs making it difficult to find focus

Engineering Contradiction:
Improvefocus speedVSAvoidfocus accuracy
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent replaces the mechanical sample stage translation system with an optical focusing system using deformable mirrors. Instead of physically moving the sample or objective lens, the invention uses voltage-controlled MEMS mirrors to dynamically adjust the focal plane by changing the mirror surface curvature, thereby eliminating mechanical vibration and sample agitation while achieving fast and accurate focusing.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention changes the physical parameter of the mirror surface curvature through applied voltage to control focusing. By varying the voltage on the MEMS mirror actuators, the radius of curvature of the mirror surface is dynamically adjusted, which changes the focal length and focuses light at different depths without mechanical movement, thus resolving the contradiction between speed and accuracy.

Inventive Principle:
Principle #35Parameter changes

2Speed

If resonant speed objective lens scanner is used to quickly translate the objective lens, then high-speed imaging is possible, but the system vibrates and shakes due to moving mass

Engineering Contradiction:
Improveimaging speedVSAvoidsystem vibration
Core Design Contradiction:
SpeedVSObject-affected harmful factors

Solution Approach 1:

The patent eliminates the mechanical objective lens scanner by using stationary MEMS mirrors for dynamic focusing. The deformable mirrors change the focal plane optically without any physical translation of the objective lens or sample stage, thus achieving high-speed imaging capability while completely avoiding the vibration and shaking caused by resonant mechanical scanners.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention extracts and removes the mechanical scanning component from the optical system. By using fixed MEMS mirrors instead of a resonant scanner, the harmful moving mass is eliminated while retaining the high-speed focusing capability through electrical control of the mirror surface shape.

Inventive Principle:
Principle #2Taking out (Extraction)

3Extent of automation

If automated sample stages are used for focusing, then focus control can be automated, but the focusing is limited to discrete step locations

Engineering Contradiction:
Improvefocus control automationVSAvoidfocus range
Core Design Contradiction:
Extent of automationVSAdaptability or versatility

Solution Approach 1:

The invention provides continuous focus control by dynamically changing the voltage applied to the MEMS mirror actuators. This allows the radius of curvature and focal length to be adjusted continuously across a wide range, enabling automated focusing at any depth position rather than being restricted to discrete mechanical steps, thus enhancing both automation and adaptability.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent implements a dynamic focusing system where the mirror surface shape can be continuously adjusted in real-time through voltage control. This dynamic capability allows for smooth, continuous focus transitions and random access to any focal plane within the range, surpassing the limited discrete step control of automated mechanical stages.

Inventive Principle:
Principle #15Dynamics

4Adaptability or versatility

If traditional zoom systems are used, then magnification can be changed, but only discrete magnification changes are possible

Engineering Contradiction:
Improvemagnification change capabilityVSAvoidzoom system complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent achieves continuous magnification changes by dynamically adjusting the focal length of the deformable mirrors through voltage control. By changing the mirror surface curvature, the effective focal length varies continuously, enabling smooth zoom transitions between different magnification levels without the complexity of mechanical zoom lenses or discrete objective lens changes.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables fast, accurate, and high-resolution imaging with the sample remaining stationary, providing variable speed focusing and zoom capabilities, and maintaining resolution over the focus range, thus overcoming the limitations of traditional microscope technologies.

Implementation Method 1

voltage is applied directly to them for fine control of their surface shape

Methodology Applied
Scientific EffectElectrostatic actuation: Electrostatics

Implementation Method 2

MEMS mirrors are reflective lenses with variable focal length

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentEP3682285B1Dynamic focus and zoom system for use with wide-field, confocal and multiphoton microscopes
Publication Date: 2022.10.05 AGILE FOCUS DESIGNS LLC
  • EP3682285B1 patent drawingFigure 1
  • EP3682285B1 patent drawingFigure 2
  • EP3682285B1 patent drawingFigure 3

AI summary

A dynamic focus and zoom system with three MEMS mirrors, three prisms, three beam splitters, three fixed lenses and an optical relay, all within a housing. The second prism, first and second fixed lenses, and first beam splitter are aligned linearly along a longitudinal axis of the optical relay. The first and second MEMS mirrors are linearly aligned with one another at a ninety-degree angle to such longitudinal axis. The third MEMS mirror, third fixed lens, third wave plate, third beam splitter and third prism are linearly aligned with one another at a ninety-degree angle to the same longitudinal axis. The third prism abuts up against the center of the optical relay between the first and second fixed lenses and is linearly aligned with the first prism such that the linear alignment of the first and third prisms is parallel to the longitudinal axis of the optical relay.