Mirror Layer Cleaning for Swingable MEMS Mirror Units
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Solution Overview
Problem
Existing mirror unit manufacturing methods face challenges in curbing the deterioration of reflectance due to foreign substances adhered to the mirror layer, which can scatter and affect the operation of the movable portion, potentially causing damage.
Innovation Solution
A manufacturing method that includes forming a structure with a swingable movable portion and a mirror layer, followed by a collecting step using a collection member to remove foreign substances without direct contact with the structure, thereby preventing operational interference and damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If air-blowing is used to remove foreign substances from the mirror layer, then foreign substances can be removed, but scattered foreign substances may enter the movable portion and affect its operation
Solution Approach 1:
A collection member is introduced as an intermediary tool between the mirror layer and the external environment. This member collects foreign substances through adhesion or suction without causing them to scatter, thereby removing contaminants while preventing them from entering the movable portion.
2Reliability
If foreign substances are removed by direct contact method, then foreign substances can be effectively removed, but the surface of the structure may be damaged
Solution Approach 1:
The collection member serves as a mediator that contacts only the foreign substances rather than the structure itself. Through adhesion or suction mechanisms, it removes contaminants without directly touching or damaging the mirror layer or other sensitive surfaces.
Solution Approach 2:
The patent replaces direct mechanical contact methods with alternative mechanisms such as adhesion (using a collection member with adhesive properties) or suction (using a collection member with suction capability). These substitution methods enable foreign substance removal without the mechanical damage risk associated with direct contact scraping or wiping.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively removes foreign substances while minimizing the risk of affecting the movable portion's operation, enhancing the mirror device's performance and yield by ensuring the movable portion's integrity.
Implementation Method 1
the collection of foreign substances is performed by bringing the collection member into contact with only the foreign substances
Implementation Method 2
the collection of foreign substances is performed by bringing the collection member into contact with only the foreign substances
Data Source
AI summary
A mirror device manufacturing method includes a forming step of forming a structure by forming a base portion, a movable portion, and a coupling portion coupling the base portion and the movable portion to each other such that the movable portion is able to swing with respect to the base portion through processing of a wafer, and forming a mirror layer in the movable portion; and a collecting step of performing collection of foreign substances from the structure using a collection member after the forming step. A mirror unit manufacturing method includes a sealing step of sealing the mirror device after the collecting step.