MEMS Mirror Design Using Lookup Table Simulation
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Solution Overview
Problem
Current techniques for computing performance characteristics of scanning mirrors in optical sensing systems, such as LiDAR, are inefficient and require excessive computational resources, making them impractical for designing scanning mirrors with specific performance requirements.
Innovation Solution
A method using a computer model with a lookup table that correlates electrostatic force and angular displacement to simulate scanning mirror oscillation, reducing computational complexity and time, and generating mirror oscillation data including drive frequency, angular displacement, and time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If current techniques are used to compute performance characteristics during the design phase, then accurate results can be obtained, but excessive computational resources and time are required
Solution Approach 1:
The patent pre-computes and stores electrostatic force values at different angular displacements in a lookup table during the design phase. This preliminary action allows the simulation to quickly retrieve pre-calculated values instead of performing complex computations in real-time, significantly reducing computation time while maintaining accuracy
Solution Approach 2:
The patent creates a simplified computational model that copies essential physical relationships (electrostatic force vs. angular displacement) into a lookup table structure. This copy allows the system to simulate mirror oscillation using straightforward data retrieval and interpolation rather than solving complex differential equations, reducing computational burden while preserving accuracy
2Measurement precision
If current techniques are used to compute performance characteristics, then accurate simulation results can be achieved, but excessive computational resources are consumed
Solution Approach 1:
The patent creates a simplified computational model that copies essential physical relationships (electrostatic force vs. angular displacement) into a lookup table structure. This copy allows the system to simulate mirror oscillation using straightforward data retrieval and interpolation rather than solving complex differential equations, reducing computational burden while preserving accuracy
Solution Approach 2:
The patent replaces complex mechanical computation (solving differential equations of motion) with a data-driven approach using lookup tables and interpolation. This substitution eliminates the need for heavy computational resources while maintaining simulation accuracy
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and efficient computation of performance characteristics during the design phase, allowing for the adjustment of design parameters to meet target performance requirements, thereby improving the design efficiency of scanning mirrors for optical sensing systems.
Implementation Method 1
The computer model may include a lookup table that correlates electrostatic force applied to a sample scanning mirror and angular displacement in the sample scanning mirror caused by the electrostatic force
Data Source
AI summary
A method for designing an optical scanning mirror is provided. The method may include receiving, by a communication interface, a set of design parameters of the scanning mirror. The method may also include simulating scanning mirror oscillation, by at least one processor, based on the set of design parameters using a computer model. In certain aspects, the computer model may include a lookup table that correlates electrostatic force applied to a sample scanning mirror and angular displacement in the sample scanning mirror caused by the electrostatic force. The method may further include generating, by the at least one processor, mirror oscillation data as an output of the computer model for designing the scanning mirror. The mirror oscillation data may include a correlation of drive frequency, angular displacement, and time.