MEMS Mirror Optical Sensing for LiDAR Angle Measurement
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Solution Overview
Problem
LiDAR systems face challenges in accurately sensing the scanning angle of MEMS mirrors in real-time, especially under varying environmental conditions and during movement, which affects the performance and lifespan of optical components.
Innovation Solution
An optical sensing system is integrated within the MEMS package, comprising an optical source, detector, and controller to emit and receive optical signals, determining the scanning angle based on the position of the returning signal, enabling closed-loop feedback control and improving accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an optical sensing system is integrated within the MEMS package, then measurement precision of scanning angle is improved, but device complexity increases
Solution Approach 1:
The patent integrates the optical sensing system (comprising optical source, optical detector, and controller) directly within the MEMS package, merging the sensing function with the existing MEMS mirror assembly. This integration enables real-time scanning angle measurement while maintaining a compact form factor, resolving the contradiction between improved measurement precision and increased device complexity through spatial consolidation of components.
2Reliability
If real-time sensing of scanning angle is implemented, then reliability of LiDAR system is improved, but use of energy increases
Solution Approach 1:
The patent implements a feedback control mechanism where the controller receives real-time scanning angle data from the optical detector and uses this information to compensate for resonance-induced position deviations. This feedback loop improves system reliability by enabling accurate angular measurement and compensation, while the energy consumption is justified by the critical need for reliable autonomous navigation data.
3Manufacturing precision
If optical sensing components are added to MEMS package, then manufacturing precision of scanning angle is improved, but ease of manufacture decreases
Solution Approach 1:
The patent combines the optical sensing components (optical source, optical detector) and the MEMS mirror assembly into a single integrated package, enabling manufacturing precision improvements through unified design while addressing manufacturing complexity through consolidated assembly processes.
4Volume of moving object
If compact packaging of optical components is achieved, then volume of system is reduced, but ease of operation for maintenance becomes harder
Solution Approach 1:
The patent employs a nested packaging structure where the optical source, optical detector, and controller are housed within the MEMS package, achieving compact volume reduction through hierarchical integration. The design prioritizes miniaturization for mobile platform integration, accepting reduced maintenance accessibility as a trade-off for the critical benefit of compact form factor.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the accuracy and performance of MEMS mirrors in LiDAR systems, maintaining a compact form factor and improving scan resolution, especially in harsh environmental conditions and during motion.
Implementation Method 1
an optical detector configured to receive a returning optical signal reflected by the backside of the MEMS mirror
Data Source
AI summary
Embodiments of the disclosure provide systems and methods for incorporating an optical sensing system in a MEMS package for real-time sensing of angular position of a MEMS mirror. The system may include an optical source configured to emit an optical signal to a backside of the MEMS mirror. The system may also include an optical detector configured to receive a returning optical signal reflected by the backside of the MEMS mirror. The system may further include at least one controller. The at least one controller may be configured to determine a scanning angle of the MEMS mirror based on a position on the optical detector where the returning optical signal is received.