MEMS Micro-Mirror Phase and Amplitude Synchronization
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Solution Overview
Problem
In light steering systems, component variations due to precision limitations in the fabrication process lead to asynchronous rotations of micro-mirrors, causing dispersion of steered light and reducing the resolution of object detection and scanning operations, making it difficult to correlate results across multiple fields of view.
Innovation Solution
A semiconductor integrated circuit with a microelectromechanical system (MEMS) and a controller that includes a phase controller and an amplitude controller to adjust the oscillatory rotation of micro-mirrors, using a phase detector, low-pass filter, and voltage-controlled delay line to synchronize phase and amplitude, ensuring uniform rotation and improved synchronization of micro-mirror arrays.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a common control signal is supplied to synchronize micro-mirror rotations, then synchronization is improved, but component variations cause rotation angle differences that disperse reflected light and reduce detection resolution
Solution Approach 1:
The patent adjusts the control signal parameters (phase and amplitude) for each individual micro-mirror assembly to compensate for fabrication variations. By measuring the actual rotation characteristics of each micro-mirror and modifying its control signal accordingly, the system achieves uniform rotation angles across all assemblies, preventing light dispersion and maintaining high detection resolution while preserving synchronization.
Solution Approach 2:
The patent implements a feedback mechanism where the rotation characteristics of each micro-mirror are measured and used to adjust its control signal. This closed-loop approach allows the system to detect deviations from desired rotation behavior and correct them by modifying control parameters, thereby achieving both synchronization and precise rotation uniformity despite component variations.
2Manufacturing precision
If precision fabrication is improved to reduce component variations, then rotation uniformity is improved, but manufacturing complexity and cost increase
Solution Approach 1:
The patent enables each micro-mirror assembly to self-adjust its rotation characteristics through individualized control signal modification. Rather than requiring ultra-precise fabrication of all components, the system allows each assembly to compensate for its own variations by adjusting control parameters based on measured performance, thereby achieving high rotation uniformity without extreme manufacturing precision.
Solution Approach 2:
The patent compensates for manufacturing variations by adjusting control signal parameters (phase and amplitude) for each micro-mirror assembly rather than attempting to manufacture all components with identical precision. This approach shifts the problem from the manufacturing domain to the control domain, reducing fabrication complexity while achieving the desired rotation uniformity.
3Adaptability or versatility
If multiple micro-mirror arrays operate asynchronously, then component variations are tolerated, but correlation of detection results across multiple fields of view becomes difficult
Solution Approach 1:
The patent uses feedback from rotation measurements to adjust control signals for each micro-mirror assembly, ensuring that all arrays rotate in synchronization despite component variations. This maintains the temporal correspondence necessary for correlating detection results across multiple fields of view while still tolerating manufacturing variations through individualized parameter adjustment.
Solution Approach 2:
The patent modifies control signal parameters (phase and amplitude) for each micro-mirror assembly to achieve uniform rotation characteristics. This ensures that multiple arrays operating in different fields of view remain synchronized in time, enabling proper correlation of detection results while accommodating component variations through parameter customization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the uniformity of micro-mirror rotations, improves the resolution of object detection and scanning, and facilitates easier correlation of results across multiple fields of view, thereby improving the robustness and performance of light steering systems.
Implementation Method 1
an actuator controllable by the controller configured to cause the micro-mirror to perform an oscillatory rotation
Implementation Method 2
configured to perform at least one of: reflect light from a light source along an output projection path
Implementation Method 3
a sensor configured to generate a measurement signal corresponding to the oscillatory rotation of the micro-mirror
Data Source
AI summary
Apparatuses and methods for controlling a micro-mirror are provided. In one example, a controller is coupled with a micro-mirror assembly comprising a micro-mirror, an actuator, and a sensor. The controller is configured to: receive a reference signal including information of a target oscillatory rotation of the micro-mirror; receive, from the sensor, the measurement signal of an oscillatory rotation of the micro-mirror; determine, based on the measurement signal and the information included in the reference signal, a difference between the oscillatory rotation of the micro-mirror and the target oscillatory rotation; receive an input control signal; generate, based on the difference and the input control signal, an output control signal to control at least one of a phase or an amplitude of the oscillatory rotation of the micro-mirror; and transmit the output control signal to the actuator.