Piezoelectric MEMS Mirror Tuning for Resonance Frequency Matching
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Solution Overview
Problem
MEMS mirrors exhibit variations in natural frequency due to manufacturing inconsistencies, leading to inefficiencies when driven at frequencies deviating from the optimal resonance frequency, and existing methods struggle to adjust these frequencies effectively.
Innovation Solution
A MEMS mirror design incorporating a flat plate, frame part, support part, and piezoelectric body, where a control voltage adjusts the spring constant by deforming the support part, allowing for precise tuning of the natural frequency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the driving frequency is preliminarily set, then the device structure is simple, but the efficiency deteriorates when the natural frequency deviates from the driving frequency
Solution Approach 1:
The patent introduces a piezoelectric body that can dynamically adjust the spring constant of the support part by applying control voltage. This makes the natural frequency adjustable rather than fixed, allowing the device to adapt to manufacturing variations and maintain high efficiency without increasing overall structural complexity
Solution Approach 2:
The patent changes the physical parameter of the support part by using a piezoelectric body whose polarization state can be altered by control voltage. This changes the spring constant from a fixed value to an adjustable parameter, enabling frequency tuning while keeping the device structure relatively simple
2Productivity
If the natural frequency is adjusted for each device, then the driving efficiency is improved, but the device complexity increases
Solution Approach 1:
The patent uses a piezoelectric body whose spring constant can be adjusted by control voltage, providing a simple mechanism to change the natural frequency parameter without adding complex mechanical adjustment mechanisms
Solution Approach 2:
The patent replaces potential mechanical adjustment mechanisms with an electrical control system using piezoelectric materials. This substitution achieves frequency adjustment through electrical voltage rather than mechanical components, reducing overall device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enables precise adjustment of natural frequencies across multiple MEMS mirrors, ensuring efficient synchronous operation and reducing manufacturing complexity.
Implementation Method 1
a piezoelectric body for control that is arranged on the support part. A control voltage is applied to the piezoelectric body for control to deform the piezoelectric body for control and deform the support part together with the deformation of the piezoelectric body for control
Data Source
AI summary
Disclosed is a MEMS mirror including a flat plate that is displaceable in a film thickness direction, a frame part that is separated from the flat plate and surrounds the flat plate, a support part that connects the flat plate and the frame part and is smaller in film thickness than the frame part, and a piezoelectric body for control that is arranged on the support part. A control voltage is applied to the piezoelectric body for control to deform the piezoelectric body for control and deform the support part together with the deformation of the piezoelectric body for control, to thereby adjust a spring constant of the support part.