MEMS Mirror Synchronization via Adjustable Driving Signal Parameters
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Solution Overview
Problem
Manufacturing Lissajous scanning systems using identical linear resonant MEMS mirrors is complex and expensive due to the need for different manufacturing processes to achieve the required frequency ratio/difference between scanning axes, limiting flexibility and increasing costs.
Innovation Solution
A system and method for mirror synchronization using driver circuits and controllers to generate driving signals with adjustable parameters (low signal level, high signal level, duty cycle, and reference phase) to maintain synchronization between oscillators, allowing identical or different mirrors to produce a Lissajous scanning pattern by controlling frequency and phase differences.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If identical linear resonant MEMS mirrors are used for Lissajous scanning, then manufacturing cost and complexity are reduced, but the ability to achieve required frequency ratio/difference between scanning axes is lost
Solution Approach 1:
The patent applies parameter changes by modifying the driving signal parameters (amplitude, frequency, phase) of identical MEMS mirrors to achieve different scanning frequencies. By controlling the electrical drive parameters rather than changing the physical mirror structure, the system achieves the required frequency ratio for Lissajous scanning while using identical mirrors throughout.
Solution Approach 2:
The patent replaces mechanical differentiation of mirrors with electrical signal control. Instead of manufacturing mirrors with different physical properties to achieve frequency differences, the system uses electronic drivers to impose different frequencies and phases on identical mirrors, substituting mechanical variation with electrical control.
2Adaptability or versatility
If different manufacturing processes are used to achieve frequency difference between scanning axes, then Lissajous scanning capability is achieved, but manufacturing complexity and cost increase
Solution Approach 1:
The patent applies universality by designing a single type of MEMS mirror that can serve multiple scanning axes with different frequency requirements. The identical mirrors are driven by programmable controllers that can generate any required frequency ratio, making the mirror design universal and eliminating the need for specialized manufacturing processes for different mirror types.
3Ease of manufacture
If linear resonant MEMS mirrors are used, then manufacturing is simplified, but synchronization control flexibility is limited
Solution Approach 1:
The patent applies dynamics by implementing dynamic control of the MEMS mirror driving signals. The controller can dynamically adjust frequency, phase, and amplitude parameters in real-time to achieve various synchronization modes including Lissajous scanning, spiral scanning, and amplitude modulated synchronization, providing flexibility without changing the static mirror structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables flexible and cost-effective Lissajous scanning by synchronizing MEMS mirrors with adjustable driving signal parameters, reducing manufacturing complexity and enhancing scanning performance.
Implementation Method 1
a first driver circuit configured to generate a first driving signal to drive the first oscillator structure about the first rotation axis at a first resonance frequency
Data Source
AI summary
A method of Lissajous scanning includes driving a first oscillator structure about a first rotation axis at a first resonance frequency according to a first driving signal, and driving a second oscillator structure about a second rotation axis at a second resonance frequency according to second driving signal different from the first resonance frequency. The first driving signal has a first low level, a first high level, and a first duty cycle, the combination of which produces the first resonance frequency, and the second driving signal has a second low level, a second high level, and a second duty cycle, the combination of which produces the second resonance frequency. At least one of the second low level, the second high level, and the second duty cycle is different from the first low level, the first high level, and the first duty cycle, respectively.