MEMS Mirror Stabilization Ring Attenuation Layer

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Solution Overview

Problem

LiDAR systems face challenges in reducing the intensity of statically reflected light, which is essential to meet performance and safety requirements, as the existing systems struggle to minimize regions of high light intensity caused by the reflection of light beams off stabilization rings.

Innovation Solution

The implementation of a MEMS device with a manipulable mirror and a stabilization ring attached by tie bars, where an attenuation layer, such as an anti-reflective coating, diffraction grating, or absorbing coating, is applied on the stabilization ring to attenuate the intensity of statically reflected light, ensuring that the light beam's tail portion does not exit the system, thereby reducing static light intensity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If the light beam diameter is increased to improve LiDAR detection coverage, then the detection area is improved, but the intensity of statically reflected light increases causing safety and performance issues

Engineering Contradiction:
Improvedetection areaVSAvoidstatically reflected light intensity
Core Design Contradiction:
Area of stationary objectVSObject-affected harmful factors

Solution Approach 1:

The patent extracts and removes the harmful statically reflected light from the system by using an attenuation layer applied to the substrate surrounding the mirror. This layer specifically targets and attenuates the light reflected from the beam's tail portion that would otherwise create harmful static reflection regions, allowing the beam diameter to be increased for better coverage without the associated safety issues.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The attenuation layer serves as an intermediary element between the substrate and the outgoing light. It mediates the interaction by selectively attenuating the statically reflected light while allowing the main scanned beam to pass through, thus resolving the contradiction between detection area and harmful reflection intensity.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Illumination intensity

If the intensity of the emitted LiDAR beam is increased to improve detection range, then detection range is improved, but the intensity of statically reflected light also increases creating safety hazards

Engineering Contradiction:
Improveemitted beam intensityVSAvoidstatically reflected light intensity
Core Design Contradiction:
Illumination intensityVSObject-affected harmful factors

Solution Approach 1:

The attenuation layer extracts and removes the harmful component (statically reflected light) from the system, allowing the emitted beam intensity to be increased for improved detection range without proportionally increasing the harmful static reflection. The attenuation layer specifically targets the reflected light path while leaving the emitted beam intact.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent converts the harmful statically reflected light into a beneficial situation by using the substrate and attenuation layer to redirect and attenuate this light. The light that would otherwise create safety hazards is now controlled and directed away from creating harmful regions, allowing higher emitted beam intensities to be used safely.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

3Manufacturing precision

If a stabilization ring is added to reduce mirror distortion during rotation, then scanning accuracy is improved, but additional static reflection regions are created

Engineering Contradiction:
Improvescanning accuracyVSAvoidstatic reflection regions
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

The attenuation layer applied to the stabilization ring acts as an intermediary that blocks the harmful static reflection from the ring while allowing the ring's stabilizing function to operate. This resolves the contradiction by eliminating the harmful effect of the ring's reflection while preserving its beneficial mechanical function of reducing mirror distortion.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The attenuation layer on the stabilization ring extracts and removes the harmful static reflection component generated by the ring, allowing the ring to be used for improving scanning accuracy without creating the harmful reflection regions that would otherwise result from its presence.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively minimizes static light intensity, allowing for increased intensity of the emitted LiDAR beam while adhering to safety standards, thereby enhancing LiDAR system performance and safety.

Implementation Method 1

An attenuation layer is disposed on a top surface of the stabilization ring and attenuates light reflected by the stabilization ring that passes through the aperture

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Implementation Method 2

The attenuation layer comprises an anti-reflective coating

Methodology Applied
Scientific EffectAnti-reflective coating: Anti-Reflective Coating

Implementation Method 3

The attenuation layer comprises a diffraction grating

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentUS11156698B2MEMS mirror device having a stabilization ring and reduced static reflection
Publication Date: 2021.10.26 BEIJING VOYAGER TECH CO LTD
  • US11156698B2 patent drawing
  • US11156698B2 patent drawing
  • US11156698B2 patent drawing

AI summary

Methods and systems for using a MEMS mirror for steering a LiDAR beam and for minimizing statically emitted light from a LiDAR system are disclosed. A LiDAR system includes a light source that emits a light beam directed at a MEMS device. The MEMS device includes a manipulable mirror that reflects the emitted light beam in a scanning pattern. The MEMS device also includes a stabilization ring positioned adjacent to and at least partially surrounding the mirror. An attenuation layer is disposed on a top surface of the stabilization ring and is configured to attenuate light reflected by the stabilization ring.