MEMS Mirror Temperature Control via Decentralized Sensors
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Solution Overview
Problem
Micromirror arrays in high-precision applications face temperature-related errors due to shifts and deformations caused by temperature fluctuations, which affect the accurate deflection of illumination radiation and the stability of components in projection exposure apparatuses.
Innovation Solution
A microelectromechanical apparatus with integrated temperature sensors and heating elements, controlled by an electronic system to maintain constant temperature values, using decentralized units for precise temperature determination and adjustment, and incorporating Bragg mirrors for enhanced optical performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If temperature sensors and heating elements are integrated into each microelectromechanical device, then temperature control precision is improved, but device complexity increases
Solution Approach 1:
The system divides the micromirror array into individual microelectromechanical devices, each with its own temperature sensor and heating element. This segmentation enables independent temperature control for each mirror element, achieving high temperature control precision while managing complexity through modular design
Solution Approach 2:
Each microelectromechanical device is equipped with localized temperature sensing and heating capabilities tailored to its specific requirements. This local quality approach allows precise temperature control at each mirror element level, addressing the need for high measurement precision without applying uniform complexity across the entire system
2Measurement precision
If decentralized electronic units are used for temperature determination and adjustment, then control precision is improved, but system complexity increases
Solution Approach 1:
The electronic control system is segmented into decentralized units, with each unit responsible for controlling a specific microelectromechanical device. This segmentation improves control precision by providing dedicated control logic for each device while managing system complexity through distributed architecture
Solution Approach 2:
Each decentralized electronic unit independently determines temperature and adjusts heating power for its associated microelectromechanical device without requiring constant central intervention. This self-service capability improves control precision while reducing the burden on central control, effectively managing system complexity
3Manufacturing precision
If heating elements are used to maintain constant temperature, then optical precision is improved, but energy consumption increases
Solution Approach 1:
Temperature sensors continuously monitor the temperature of each mirror element and provide feedback to the electronic control system. The control system adjusts heating power based on this feedback to maintain constant temperature, improving optical precision while minimizing energy consumption by only heating when necessary
Solution Approach 2:
The heating elements operate in a periodic manner, activating only when temperature deviations are detected and deactivating when target temperature is achieved. This periodic action maintains optical precision by ensuring temperature stability while reducing overall energy consumption compared to continuous heating
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution prevents temperature-related errors and deformations, ensuring precise reflection of illumination radiation and maintaining mechanical stability, allowing for more accurate and efficient operation of projection exposure apparatuses, even under fluctuating conditions.
Implementation Method 1
a heating element for heating the respective mirror element (134)
Implementation Method 2
one or more temperature sensors and an electronic system (125), wherein the electronic system (125) is configured to determine a temperature value of the respective mirror element (134) using the one or more temperature sensors
Implementation Method 3
incorporating Bragg mirrors for enhanced optical performance
Implementation Method 4
an actuator for moving the respective mirror element (134)
Data Source
AI summary
The invention relates to a microelectromechanical apparatus (100, 200) comprising one or more microelectromechanical devices (130) each having a mirror element (134), an actuator (132) for moving the respective mirror element (134), and a heating element (138, 240) for heating the respective mirror element (134), wherein the microelectromechanical apparatus (100) comprises one or more temperature sensors (135, 145, 210, 212) and an electronic system (125, 225), wherein the control electronic system (125, 225) is configured to determine a temperature value of the respective mirror element (134) using the one or more temperature sensors (135) for each mirror element (134), and the electronic system (125, 225) is further configured to adjust a heating power for each of the heating elements (138, 240). The invention further relates to an illumination optical unit (172), to an illumination system (174) and to a projection exposure apparatus (170), each having a microelectromechanical apparatus (100, 200) according to the invention, and to a method for controlling temperatures of a microelectromechanical apparatus (100, 200) in a closed-loop.