MEMS Mirror Vibration Control via Temperature Presumption

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Solution Overview

Problem

Conventional image displaying apparatuses using MEMS resonance mirrors face challenges in achieving high brightness due to increased heat generation from higher laser output energy, which can damage the mirrors and affect their vibration conditions.

Innovation Solution

An image displaying apparatus with a reflection mirror vibrating mechanism, temperature presuming unit, and vibration condition adjusting unit that adjusts the vibration amplitude, frequency, or phase of the reflection mirror based on presumed temperature to maintain optimal conditions and prevent heat-related damage, ensuring high brightness without ill effects on the mirror structures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If the output energy from the laser light source is increased to achieve high brightness, then the brightness of the projection image is improved, but the temperature of the MEMS resonance mirrors increases causing structural damage and vibration condition degradation

Engineering Contradiction:
Improvebrightness of projection imageVSAvoidtemperature of MEMS resonance mirrors
Core Design Contradiction:
Illumination intensityVSTemperature

Solution Approach 1:

The patent converts the harmful thermal effect into a useful measurement signal. By detecting the frequency shift of the MEMS mirror's vibration caused by temperature increase, the system uses the thermal effect as a diagnostic tool to trigger protective actions, thereby preventing actual damage while maintaining high brightness operation

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent implements a feedback control mechanism where the vibration frequency of the MEMS mirror is continuously monitored. When frequency shift indicating temperature rise is detected, the system automatically reduces laser output energy, creating a closed-loop control that prevents thermal damage while allowing high brightness operation within safe limits

Inventive Principle:
Principle #23Feedback

2Illumination intensity

If the output energy from the laser light source is increased to achieve high brightness, then the brightness of the projection image is improved, but the vibration condition of the MEMS resonance mirrors deteriorates

Engineering Contradiction:
Improvebrightness of projection imageVSAvoidvibration condition of MEMS resonance mirrors
Core Design Contradiction:
Illumination intensityVSStability of the object's composition

Solution Approach 1:

The system continuously monitors the vibration frequency of the MEMS mirror and uses this feedback to detect changes in vibration conditions. When frequency shift indicates degradation, the laser output energy is automatically reduced, preventing further deterioration while maintaining optimal brightness

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent replaces direct mechanical monitoring of the MEMS mirror with an optical measurement method. By using a light source and detector to measure vibration frequency, the system non-contactively monitors vibration conditions, enabling precise detection without mechanical interference

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution allows for increased laser output energy without damaging the reflection mirrors, maintaining their structural integrity and vibration stability, thereby achieving high brightness in projected images while preventing heat-related issues.

Implementation Method 1

a reflection mirror, which is configured to display an image on a projection object, upon receiving a light irradiated from a light source thereon, to reflect it into a predetermined direction

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

a reflection mirror vibrating mechanism, which is configured to vibrate said reflection mirror into a predetermined direction

Methodology Applied
Scientific EffectMechanical vibration: Vibration

Implementation Method 3

components of the remaining 10% of the laser beam lights, which are not reflected upon, are absorbed in the MEMS resonance mirrors, and almost of them are converted into heats on the MEMS resonance mirrors

Methodology Applied
Scientific EffectThermal conversion of light energy: Heating

Data Source

PatentUS8210687B2Image displaying apparatus, and a method for adjusting vibrating condition of a reflection mirror in the image displaying apparatus
Publication Date: 2012.07.03 MAXELL LTD
  • US8210687B2 patent drawing
  • US8210687B2 patent drawing
  • US8210687B2 patent drawing

AI summary

For enabling to prevent ill effects from being generated in the structures of a reflection mirror, even if increasing an output energy from a light source, thereby preventing ill influences from being exerted on the driving condition thereof, a mirror drive controller unit 7 reads out history data of the past, relating to temperature changes on a micro mirror 1, from a first LUT holder unit 19. Upon basis of the read-out history data of the past is presumed the temperature on the micro mirror 1 at the present time. The presumed temperature on the micro mirror 1 is temperature P temp of the micro mirror 1 at the present time, and upon that P temp are changed vibration (or oscillation) condition of the micro mirror 1 in the horizontal (H) direction and vibration (or oscillation) condition thereof in the vertical (V) direction.