Multisensor MEMS/NEMS Optical Resonators With Synchronous Demodulation
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Solution Overview
Problem
Existing MEMS and NEMS sensor arrays face challenges in efficiently reading individual information from multiple sensors due to the need for complex wavelength-multiplexing/demultiplexing components and the difficulty in adapting to variable resonance wavelengths, leading to suboptimal signal separation and reconfiguration.
Innovation Solution
A measurement system utilizing a resonant assembly with multiple optical resonators, waveguides, and synchronized demodulation modules to superpose and demodulate light beams at specific frequencies, enabling simultaneous extraction of individual sensor information through synchronous detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If wavelength-multiplexing/demultiplexing components are used to read sensor arrays, then multiple sensors can be addressed simultaneously, but the device complexity increases and adaptability to variable resonance wavelengths deteriorates
Solution Approach 1:
The patent replaces optical wavelength-multiplexing/demultiplexing components with electronic frequency-modulation and synchronous-detection systems. Instead of using optical components to separate wavelengths, the system modulates light at different frequencies and uses electronic synchronous-detection to separate the signals, thereby reducing optical device complexity while maintaining simultaneous multi-sensor reading capability.
Solution Approach 2:
The patent changes the encoding parameter from wavelength to frequency. By modulating light at different frequencies rather than using different wavelengths, the system achieves better adaptability to variable resonance wavelengths of sensors while reducing the complexity of demultiplexing components.
2Loss of information
If wavelength-multiplexing/demultiplexing is used for signal separation, then multiple sensor signals can be separated, but the adaptability to variable resonance wavelengths deteriorates
Solution Approach 1:
The patent changes the encoding parameter from wavelength to frequency. Frequency-modulation allows the system to adapt to variable resonance wavelengths of sensors because the separation is performed in the frequency domain through synchronous-detection, rather than relying on fixed wavelength assignments that would be sensitive to resonance wavelength variations.
3Productivity
If complex wavelength-multiplexing components are used, then multiple sensors can be read simultaneously, but the ease of reconfiguration deteriorates
Solution Approach 1:
The patent replaces fixed optical wavelength-multiplexing components with flexible electronic frequency-modulation and synchronous-detection systems. This substitution enables easier reconfiguration, as electronic frequency settings can be dynamically adjusted without requiring physical reconfiguration of optical components.
4Loss of information
If wavelength demultiplexing is used for signal separation, then sensor signals can be separated, but the signal-to-noise ratio deteriorates
Solution Approach 1:
The patent employs synchronous-detection with feedback mechanisms to enhance signal-to-noise ratio. The synchronous-detection process uses reference signals that are synchronized with the modulation frequencies, allowing for precise signal extraction and rejection of noise, thereby improving measurement precision while maintaining signal separation capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system allows for straightforward reconfiguration and efficient separation of signals from each sensor, improving measurement precision and robustness by coding information through frequency modulation rather than wavelength demultiplexing, enhancing signal-to-noise ratio and reducing complexity.
Implementation Method 1
the absorption of a biological or other body at the surface of the resonator modifies its effective index of propagation and changes the position of the resonance wavelength λr(u)
Implementation Method 2
The displacement x of the beam (parameter u) in the evanescent field of the optical resonator disrupts the effective index (variation in the 'gap' between the beam and the ring)
Implementation Method 3
The resonant mechanical element is a membrane Memb on a thin layer of silicon, Si slab, the vibration (resonance) of which is induced by an ultrasound UltraS wave to be measured
Implementation Method 4
The optical resonator is characterized by at least one resonance wavelength λr associated with a resonance passband of width λr/Qopt
Data Source
AI summary
A MEMs and/or NEMs measurement system includes a resonant assembly comprising: an input and an output, a plurality of N optical resonators Ri indexed i each having a resonance wavelength λr,i, at least one waveguide to which the optical resonators are coupled, at least one element coupled to each resonator Ri, an emission device, a modulation device, an injection device configured to superpose the N light beams to form an input beam and to inject the beam as input to the resonant assembly, at least one detector configured to detect a light beam arising from the beam at the output of the resonant assembly and to generate an output signal, a demodulation device comprising at least N synchronous-detection demodulation modules.