MEMS Optical Beam Waveguide 2D Deflection
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Solution Overview
Problem
Existing optical interconnects for semiconductor devices face challenges in achieving high bandwidth and low power consumption due to alignment issues, cost, and complexity, particularly in transferring modulated light signals between integrated circuit chips using conductor-based connections and external mirrors or deflectors.
Innovation Solution
The implementation of MEMS optical beam waveguides with two-dimensional deflection electrodes and controlled feedback for precise alignment, allowing for point-to-point optical communications between stacked die modules without external deflection structures, thereby reducing alignment errors and increasing bandwidth.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If external mirrors or deflectors are used to transfer optical signals between IC chips, then alignment flexibility is improved, but device complexity and cost increase
Solution Approach 1:
The patent combines the optical waveguide and deflection structures into a single integrated device. The waveguide includes integrated deflectors that can steer optical signals in multiple directions without requiring external mirrors or separate deflection components. This merging of functions reduces device complexity while maintaining alignment flexibility through the integrated deflection capability.
Solution Approach 2:
The optical waveguide is designed with multiple deflectors that enable it to perform both signal transmission and dynamic beam steering functions. The waveguide can adapt to different alignment requirements by adjusting the deflection angles of its integrated deflectors, providing multi-functionality without requiring separate specialized components for each function.
2Reliability
If tight alignment tolerances are used to meet information transmission requirements, then signal transmission quality is improved, but manufacturing precision requirements and cost increase
Solution Approach 1:
The patent employs dynamic deflection control within the optical waveguide to compensate for alignment variations. The integrated deflectors can actively adjust beam direction in real-time, allowing the system to maintain high signal transmission quality even when manufacturing alignment tolerances are relaxed. This dynamic adjustment capability reduces the stringency of manufacturing precision requirements.
Solution Approach 2:
The system incorporates feedback mechanisms that monitor optical signal transmission and adjust the deflector positions accordingly. This feedback control enables the waveguide to self-correct alignment errors, maintaining reliable signal transmission while reducing the need for extremely tight initial alignment tolerances during manufacturing.
3Ease of manufacture
If conductor-based connections are used for data signal communication, then ease of manufacture is improved, but power consumption and bandwidth are limited
Solution Approach 1:
The patent replaces electrical conductor-based connections with optical waveguide connections for data signal transmission. Optical signals carry information through light rather than electrical current, eliminating the power consumption and bandwidth limitations associated with electrical conductors while maintaining ease of manufacture through standard semiconductor fabrication processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables high-density, low-power, high-performance information systems by providing precise optical alignment and communication between die stacks, enhancing bandwidth and reducing system complexity and costs.
Implementation Method 1
A first plurality of separate deflection electrodes is formed on a first side of the MEMS optical beam waveguide to laterally deflect the optical beam. A second plurality of separate deflection electrodes is formed on an opposite side of the MEMS optical beam waveguide for additional lateral deflection. A third plurality of separate deflection electrodes is formed above the MEMS optical beam waveguide for vertical deflection.
Implementation Method 2
A monochromatic, directional, and coherent laser light beam is modulated to encode information for transfer to other devices or circuits of the system, typically by transferring modulated light signals along an optical fiber or waveguide path.
Data Source
AI summary
A high density, low power, high performance information system, method and apparatus are described in which an integrated circuit apparatus includes a plurality of deflectable MEMS optical beam waveguides (e.g., 190) at each die edge which are each formed with an optical beam structure (193) which is encapsulated by a waveguide beam structure (194) to extend into a deflection cavity (198) and which is surrounded by a plurality of deflection electrodes (195-197) that are positioned on walls of the deflection cavity (198) to provide two-dimensional deflection control of each deflectable MEMS optical beam waveguide in response to application of one or more deflection voltages to provide optical communications (e.g., 184) between different die.