MEMS Optical Bench Trenches for Light Routing
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Solution Overview
Problem
The process of placing, aligning, and fixing fully and partially reflecting mirrors on a Micro-Electro-Mechanical Systems (MEMS) optical bench is time-consuming and expensive, especially as devices become smaller, and requires precise control of light routing through free space.
Innovation Solution
An optical bench with trenches and angled reflection side walls is fabricated, allowing light to be routed through free space, with trenches defined by etched side walls and angled reflection surfaces that can be oriented to reflect light beams at desired angles, and optionally coated with reflective materials to enhance reflectivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If fully and partially reflecting mirrors are used to route light through free space in a MEMS optical bench, then light routing precision is improved, but manufacturing cost and complexity increase due to time-consuming placement, alignment, and fixing processes
Solution Approach 1:
The patent merges the mirror substrate and the optical bench into a single integrated structure. The optical bench serves dual functions as both the mounting platform and the reflective surface for light routing. This integration eliminates the need for separate mirror components, their placement, alignment, and fixing processes, thereby reducing manufacturing complexity while maintaining light routing precision through the engineered optical paths and reflective surfaces within the unified optical bench structure.
2Manufacturing precision
If by-hand alignment of mirrors is required, then light routing precision is improved, but manufacturing cost and time increase significantly
Solution Approach 1:
The patent incorporates pre-defined optical paths and pre-configured reflective surfaces during the optical bench fabrication process. The optical routes are established through the bench structure itself rather than requiring post-fabrication mirror alignment. This preliminary configuration of light routing paths enables automated or standardized manufacturing processes to achieve precise alignment without time-consuming by-hand adjustments, thereby improving manufacturing efficiency while maintaining alignment precision.
3Volume of moving object
If devices are made smaller, then miniaturization is achieved, but the difficulty and cost of placing and aligning mirrors increases
Solution Approach 1:
The patent integrates the mirror functions directly into the optical bench structure, eliminating separate mirror components that would need to be placed and aligned. The optical bench itself provides the reflective surfaces and light routing paths at the miniaturized scale. This integration removes the manufacturing challenges associated with placing and aligning tiny mirrors in compact devices, enabling miniaturization while maintaining ease of manufacture through standardized fabrication processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables precise and efficient routing of light through free space within the optical bench, reducing alignment costs and complexities, while allowing for flexible beam routing and improved reflectivity through optimized trench and surface configurations.
Implementation Method 1
an angled reflection side wall operable to receive the beam of light routed through the first trench and operable to reflect at least a portion of the beam of light
Data Source
AI summary
An optical bench communicates light through free space in a plurality of trenches formed in the bench, each of the trenches formed by deep ion reactive etching and defined by two opposing side walls, such that the free space is between the opposing side walls. An exemplary embodiment has a first trench operable to receive the beam of light and operable to communicate the beam of light through the free space in the first trench; an angled reflection side wall operable to receive the beam of light routed through the first trench and operable to reflect at least a portion of the beam of light; and a second trench operable to receive the portion of the beam of light reflected from the angled reflection side wall and operable to route the portion of the beam of light through the free space in the second trench.