Transparent Conductive Coating for MEMS Optical Charge Dissipation

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Solution Overview

Problem

Electrostatic charges on optical components in MEMS devices can cause calibration errors and scanning inaccuracies due to interference with the electromagnetic fields used for movement, especially when protective stickers are removed during manufacturing or when users interact with the devices.

Innovation Solution

Applying a transparent conductive coating on one or both sides of the optical elements to dissipate electrostatic charges, which can be grounded for enhanced charge dissipation, while also allowing the light to pass through and modifying optical characteristics with additional layers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conductive coating is applied to the optical element, then electrostatic charge dissipation is improved, but optical transparency may be compromised

Engineering Contradiction:

Improveelectrostatic charge dissipationVSAvoidoptical transparency

Core Design Contradiction:

ReliabilityVSIllumination intensity

Solution Approach 1:

The patent applies different properties to different parts of the optical element by using a conductive coating with specific local characteristics - the coating is applied only where needed to dissipate electrostatic charges while maintaining optical transparency in the regions where light transmission is critical. This localized application resolves the contradiction by having the coating serve its charge dissipation function without compromising overall optical performance.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The patent resolves the contradiction by changing the parameters of the conductive coating, specifically its thickness and material composition, to optimize both electrostatic charge dissipation and optical transparency. By adjusting these parameters, the coating can effectively dissipate charges while remaining substantially transparent to light, thus satisfying both requirements simultaneously.

Inventive Principle:

Principle #35Parameter changes

2Reliability

If the optical element is left uncovered, then optical clarity is maintained, but electrostatic charges accumulate causing scanning errors

Engineering Contradiction:

Improvescanning accuracyVSAvoidelectrostatic charge accumulation

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent converts the harmful effect of electrostatic charge accumulation into a beneficial outcome by applying a conductive coating that actively dissipates these charges. The coating transforms the potential harm of charge buildup into a controlled charge management system, preventing scanning errors while maintaining the optical element's functionality. This resolves the contradiction by eliminating the harmful factor without compromising the element's exposed state.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

3Ease of operation

If a protective sticker is removed during manufacturing, then optical access is enabled, but electrostatic charges are generated on the optical element

Engineering Contradiction:

Improveoptical accessVSAvoidelectrostatic charge generation

Core Design Contradiction:

Ease of operationVSObject-generated harmful factors

Solution Approach 1:

The patent applies the conductive coating to the optical element before final assembly and before the protective sticker is removed. This preliminary action ensures that when the sticker is later removed for optical access, the electrostatic charges generated during this process are immediately dissipated by the pre-applied conductive coating, preventing charge accumulation and subsequent scanning errors.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The conductive coating effectively reduces the impact of electrostatic charges on MEMS devices, ensuring accurate calibration and improved performance by preventing scanning errors and maintaining smooth video projection or three-dimensional scanning.

Implementation Method 1

a conductive coating over the optical element, wherein the conductive coating dissipates the electrostatic charge

Methodology Applied

Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

The transparent conductive coating may dissipate the electrostatic charge, decreasing the chances that the electrostatic field may interfere with nearby MEMS devices

Methodology Applied

Scientific EffectElectromagnetic radiation transmission: Light

Data Source

PatentUS10356389B2Dissipating an electrostatic charge from an optical element

Publication Date: 2019.07.16 INTEL CORP

AI summary

A method and apparatus for dissipating an electrostatic charge from an optical element are described. An apparatus includes the optical element, a microelectromechanical system (MEMS) device located proximate to the optical element, and a conductive coating over the optical element, wherein the conductive coating is substantially transparent, and wherein the conductive coating dissipates the electrostatic charge.