MEMS Sensor Array Optical Readout for Noise Immunity
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Solution Overview
Problem
Current MEMS sensors for measuring fluid viscosity and detecting chemicals in fluids face limitations such as requiring electrical connections, limited optical detection options, vulnerability to environmental noise, and inability to function in fieldable, label-free, and parallel settings, making them unsuitable for portable and point-of-care diagnostics.
Innovation Solution
A miniaturized, highly selective, and sensitive MEMS sensor array using vibrating microcantilevers with integrated optoelectronic chips for resonance frequency and phase measurement, actuated by electromagnetic forces, and featuring a disposable cartridge design with optical feedback for robust, parallel, and label-free detection of fluid viscosity and chemical changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If electrical connections are used to couple the sensor to a detector, then the sensor can be integrated with electronics, but the sensor becomes vulnerable to environmental noise and requires complex electrical conductors
Solution Approach 1:
The patent replaces electrical coupling with optical coupling. The MEMS sensor detects mechanical vibrations and converts them to optical signals that can be transmitted through optical fibers to a remote detector, eliminating the need for electrical connections between the sensor and detector. This substitution resolves the contradiction by maintaining integration capability while eliminating vulnerability to environmental noise and complex electrical conductor requirements.
2Measurement precision
If the sensor is miniaturized for lower detection limits, then sensitivity increases, but the sensor becomes more fragile and difficult to manufacture
Solution Approach 1:
The patent segments the sensing system into two parts: a disposable miniaturized MEMS sensor array that provides high sensitivity, and a reusable detector unit that contains the electronics and optics. This segmentation allows the miniaturized sensor to be manufactured with high precision using standard MEMS fabrication processes while the complex electronics are housed in a separate, reusable unit, thereby reducing overall manufacturing difficulty.
3Productivity
If the sensor array is made parallel for high-throughput detection, then productivity increases, but the device complexity and integration requirements increase
Solution Approach 1:
The patent designs a universal detector unit that can read out multiple MEMS sensor arrays simultaneously through optical coupling. The detector contains a single photodetector array that can detect vibrations from multiple cantilevers in parallel, eliminating the need for separate readout electronics for each sensor. This multi-functionality enables high-throughput parallel detection while keeping the overall device complexity manageable.
4Reliability
If optical detection is used instead of electrical readout, then immunity to environmental noise improves, but the optical detection options and integration become limited
Solution Approach 1:
The patent introduces optical fibers as an intermediary medium to couple the MEMS sensor to the photodetector. The optical fiber transmits mechanical vibrations from the cantilever to the photodetector without requiring electrical connections, providing immunity to environmental noise. The system maintains versatility by allowing different optical coupling configurations and detector designs to be used with the same MEMS sensor array.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables sensitive detection of minute chemical and biological agents with improved reproducibility and specificity, suitable for point-of-care diagnostics and environmental monitoring, with potential for early disease diagnosis and personalized treatment guidance.
Implementation Method 1
a sensor array that is miniaturized, highly selective, highly sensitive, parallel, label-free and/or portable... actuated by electromagnetic forces
Implementation Method 2
with integrated optoelectronic chips for resonance frequency and phase measurement... featuring a disposable cartridge design with optical feedback
Implementation Method 3
measuring fluid viscosity and detection of minute amounts of chemicals in fluids... the dynamics of the vibration (phase and amplitude) are influenced by the viscosity of the liquid
Implementation Method 4
the ability to selectively place functionalized regions on the these cantilevers... detection of minute amounts of chemicals and biological agents in fluids
Data Source
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AI summary
The present invention relates generally to the field of chemical and biological sensors and in particular to micro electro-mechanical systems (MEMS) sensors for measuring fluid viscosity and detection of minute amounts of chemicals and biological agents in fluids. It is an object of the present invention to provide a sensor that will work in disposable cartridges with remote sensing that can measure dynamic changes of the functionalized cantilevers in liquid and gas environment.