MEMS Optical Shutter with Rotating Shielding Structures
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Solution Overview
Problem
Existing MEMS optical shutters lack the ability to control the optical aperture with a large number of degrees of freedom, limiting their functionality compared to professional cameras which can adjust the aperture variably.
Innovation Solution
A MEMS optical shutter with translating shielding structures, comprising a substrate with dielectric regions and conductive layers, and a manufacturing process that involves forming shielding structures with piezoelectric actuators to control the optical aperture.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single bonded layer with etched shutter blades is used, then the device structure is simplified, but the degrees of freedom for aperture adjustment are limited
Solution Approach 1:
The single bonded layer is divided into multiple independent shutter blades, each capable of independent actuation. This segmentation allows each blade to be controlled separately by individual microactuators, thereby increasing the degrees of freedom for aperture adjustment while maintaining the simplicity of the single-layer structure
Solution Approach 2:
The shutter blades are designed to be dynamically movable rather than fixed, enabling synchronous shifting of multiple blades to form a variable polygonal aperture. This dynamic configuration allows the aperture shape and size to be adjusted in real-time, providing versatile control over light transmission
2Adaptability or versatility
If multiple-blade irises are implemented, then the aperture control versatility is improved, but the manufacturing complexity increases
Solution Approach 1:
Multiple shutter blades are merged into a single bonded layer structure, where all blades are formed in one continuous substrate. This merging approach allows multiple blades to be manufactured simultaneously using a single etching process, reducing manufacturing complexity while maintaining aperture control versatility
Solution Approach 2:
The single bonded layer serves multiple functions: it provides the structural substrate for all shutter blades, acts as the etching template for forming blade shapes, and serves as the mounting platform for microactuators. This multi-functionality simplifies the manufacturing process by eliminating the need for separate fabrication steps for each component
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution allows for precise control of the optical aperture over the entire perimeter of the main aperture, providing a large number of degrees of freedom for adjustment, thus enhancing the functionality of the MEMS optical shutter.
Implementation Method 1
shielding structures with piezoelectric actuators to control the optical aperture
Data Source
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AI summary
A MEMS shutter including: a substrate (2) of semiconductor material traversed by a main aperture (9), and a first semiconductor layer (14) and a second semiconductor layer (16), which form a supporting structure (28, 71) fixed to the substrate; a plurality of deformable structures (29, 59, 69); a plurality of actuators (36; 96); and a plurality of shielding structures (33; 35; 333; 335; 433), each of which is formed by a corresponding portion of at least one between the first semiconductor layer and the second semiconductor layer, the shielding structures being arranged angularly around the underlying main aperture so as to provide shielding of the main aperture, each shielding structure being further coupled to the supporting structure via a corresponding deformable structure. Each actuator may be controlled so as to cause a rotation of a corresponding shielding structure between a respective first position and a respective second position, thus varying shielding of the main aperture. The first and second positions of the shielding structures are such that, in at least one operating condition of the MEMS shutter (1), pairs of adjacent shielding structures at least partially overlap one another.