In-Plane MEMS Optical Switch for Chip-Lidar Beam Steering
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Solution Overview
Problem
Current approaches for beam steering in chip-Lidar, such as micro mirror arrays, optical phased arrays, and photonic crystal waveguides, face challenges like limited field of view, complex control electronics, and high laser requirements, making them unsuitable for practical implementation in autonomous vehicles.
Innovation Solution
The use of a MEMS switch-based amplitude array with a bus waveguide, optical antenna, and interdigitated electrodes that control the position of the optical antenna relative to the waveguide, enabling beam steering through voltage thresholds, simplifying control electronics and increasing field of view without requiring large wavelength tunability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If micro mirror array is used for beam steering, then beam steering capability is achieved, but device complexity and control electronics complexity increase
Solution Approach 1:
The system segments the beam steering function into multiple independent optical antennas that can be selectively activated. Each antenna is controlled by simple voltage thresholds rather than complex electronic control circuits, reducing overall system complexity while maintaining steering capability
Solution Approach 2:
The patent replaces mechanical micro mirror arrays with a MEMS-based optical antenna system that uses voltage-controlled positioning. This substitution eliminates complex control electronics while achieving the same beam steering function through electrostatic actuation
2Ease of operation
If optical phased array is used for beam steering, then beam steering capability is achieved, but control electronics complexity increases
Solution Approach 1:
The system changes the control parameter from complex phase modulation to simple voltage threshold control. By controlling the position of optical antennas relative to the waveguide through voltage thresholds, the system achieves beam steering without requiring complex phased array electronics
3Ease of operation
If wavelength tuning is used for beam steering, then beam steering capability is achieved, but laser tunability requirements increase
Solution Approach 1:
The patent replaces wavelength tuning with a mechanical positioning system where optical antennas are moved relative to the waveguide using voltage-controlled MEMS actuators. This substitution eliminates the need for laser wavelength tunability while achieving beam steering through spatial positioning
4Ease of operation
If photonic crystal waveguides are used for beam steering, then beam steering capability is achieved, but field of view is limited
Solution Approach 1:
The system employs dynamic positioning of optical antennas relative to the waveguide, allowing continuous adjustment of beam direction. This dynamic control enables a wider field of view compared to static photonic crystal waveguide structures by actively repositioning antennas to different coupling positions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides a more straightforward and stable beam steering mechanism with a larger field of view, simpler control electronics, and no need for high laser tunability, making it suitable for chip-Lidar applications in autonomous vehicles.
Implementation Method 1
interdigitated electrodes coupling the substrate with optical antenna and configured to control a position of the optical antenna relative to the first bus waveguide. When a voltage difference applied to the interdigitated electrodes is less than a lower threshold, the optical antenna is at a first position offset from the first bus waveguide, when the voltage difference applied to the interdigitated electrodes is greater than an upper threshold, the optical antenna is at a second position offset from the first bus waveguide
Implementation Method 2
an optical antenna suspended over the first bus waveguide via a spring
Data Source
AI summary
An optical switch includes a first bus waveguide supported by a substrate, an optical antenna suspended over the first bus waveguide via a spring, and interdigitated electrodes coupling the substrate with optical antenna and configured to control a position of the optical antenna relative to the first bus waveguide. When a voltage difference applied to the interdigitated electrodes is less than a lower threshold, the optical antenna is at a first position offset from the first bus waveguide, when the voltage difference applied to the interdigitated electrodes is greater than an upper threshold, the optical antenna is at a second position offset from the first bus waveguide, and the offset at the second position is greater than at the first position.